Acta Optica Sinica, Volume. 36, Issue 8, 811003(2016)
Measuring Method of Polarization Aberration Based on Vector Aerial Image of Alternating Phase-shift Mask
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Shen Lina, Wang Xiangzhao, Li Sikun, Yan Guanyong, Zhu Boer, Meng Zejiang, Zhang Heng. Measuring Method of Polarization Aberration Based on Vector Aerial Image of Alternating Phase-shift Mask[J]. Acta Optica Sinica, 2016, 36(8): 811003
Category: Imaging Systems
Received: Jan. 28, 2016
Accepted: --
Published Online: Aug. 18, 2016
The Author Email: Shen Lina (shenlina@siom.ac.cn)