Infrared and Laser Engineering, Volume. 51, Issue 9, 20220531(2022)
High-efficiency and high-quality combined polishing method of zinc selenide crystal (invited)
[1] LI Shijie, Tian Rong, Wang Shouyi, et al. Research on compensation processing technology for infrared optical components[J]. Journal of Xi'an Technological University, 40, 146-152(2020).
[2] Wang Lingxue, Cai Yi. Recent progress and perspectives of infrared optical systems[J]. Infrared Technology, 41, 1-12(2019).
[3] Hao Siyuan, Xie Jianan, Wen Maoxing, et al. Design and realization of light and small long-wave infrared optical system[J]. Infrared and Laser Engineering, 49, 20200031(2020).
[4] Zhang F, Yang Q, Bian H, et al. Fabrication of ZnSe microlens array for a wide infrared spectral region[J]. IEEE Photonics Technology Letters, 32, 1327-1330(2020).
[5] Kadzevičius N, Švagždytė I, Gargasas J, et al. Investigation of polishing characteristics for aspherical lenses manufacturing[J]. Mechanics, 26, 457-461(2020).
[6] [6] Vilkova E Y, Timofeev O V. Mechanical polishing of ZnSe using rosinbased resins[J]. Inganic Materials, 2010, 46(3): 264268.
[7] [7] Tomashyk V M. Optimization of conditions f treatment of ZnSe crystal surfaces by chemical etching[J]. Semiconduct Physics Quantum Electronics Optoelectronics, 2013, 16(2): 140145.
[8] Lucca D A, Shao L, Wetteland C J, et al. Subsurface damage in (100) ZnSe introduced by mechanical polishing[J]. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 249, 907-910(2006).
[9] Dong Yunna, Cao Shuyun. Study on polishing zinc selenide wafer[J]. Diamond & Abrasives Engineering, 36, 83-86(2016).
[10] Li Qingzhong, Shi Weibin, Xia Mingguang. Effect of abrasive on ultrasound fine atomization CMP of zinc selenide[J]. Semiconductor Optoelectronics, 39, 815(2018).
[11] [11] Rao Zhimin. Zinc sulfide aspherical surface polishing using wheel polishing[D]. Harbin: Harbin Institute of Technology, 2017. (in Chinese)
[12] Geng Ruiwen, Xie Qiming, Zhang Wanqing, et al. Study on the material removal mechanism of ZnSe crystal via ultra-precision diamond turning[J]. Infrared and Laser Engineering, 50, 20200403(2021).
[13] [13] Bai Yang. Preparation of MR polishing fluid study on stability of removal function[D]. Changchun: University of Chinese Academy of Sciences (Changchun Institute of Optics, Fine Mechanics Physics, Chinese Academy of Sciences), 2012. (in Chinese)
[14] Bai Y, Zhang X, Yang C, et al. Material removal model of magnetorheological finishing based on dense granular flow theory[J]. Light: Advanced Manufacturing, 3, 1-10(2022).
[15] Wang Jiaqi, Xiao Qiang. Research progress of magnetorheological polishing technology[J]. Surface Technology, 48, 317-328(2019).
[16] Salzman S, Romanofsky H J, West G, et al. Acidic magnetorheological finishing of infrared polycrystalline materials[J]. Applied Optics, 55, 8448-8456(2016).
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Chao Yang, Naiwen Zhang, Yang Bai. High-efficiency and high-quality combined polishing method of zinc selenide crystal (invited)[J]. Infrared and Laser Engineering, 2022, 51(9): 20220531
Category: Special issue—Ultra precision manufacture and testing technology of optical aspheric surface
Received: Aug. 1, 2022
Accepted: --
Published Online: Jan. 6, 2023
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