Infrared and Laser Engineering, Volume. 51, Issue 9, 20220531(2022)
High-efficiency and high-quality combined polishing method of zinc selenide crystal (invited)
Figures & Tables(13)
Fig. 5. Material removal efficiency and roughness of ZnSe polished by different magnetorheological polishing liquids
Fig. 6. Roughness of the material after processing with No. 2 magnetorheological fluid
Fig. 8. Surface roughness of the material after CCOS fine polishing
Table 1. Characteristic and properties of ZnSe
View tableView in ArticleTable 1. Characteristic and properties of ZnSe
Material Type Crystal structure Hv/ GPa Grain size/μm Density/ g·mm−3 ZnSe Polycrystalline Cubic 0.9±0.05 43±9 5.26
Table 2. Composition of MR polishing fluid
View tableView in ArticleTable 2. Composition of MR polishing fluid
Ingredient Deionized water Carbonyl iron powder （CIPs） Glycerin Rust inhibitor Sodium carbonate Citric acid Auxiliaries polish powder Volume fraction Other 35% 3% 0.8% 2% 0.6% 0.2% 0.2%
Table 3. Process parameter
View tableView in ArticleTable 3. Process parameter
Parameter Wheel diameter/mm Rotate speed/r·min−1 Penetration depth/mm Magnetic field Value 160 120 0.8 340 mT
Table 4. Experimental results of removal function for different polishing liquid compositions
View tableView in ArticleTable 4. Experimental results of removal function for different polishing liquid compositions
MR polishing fluid series Abrasive type Removal rate/μm·min−1 Roughness/nm 1 single crystal diamond/100 nm 5.2 9 2 Alumina/100 nm 1.8 4 3 Alumina/800 nm 3.6 8.5 4 Polycrystalline diamond/100 nm 2.88 10 5 Silicon oxide/100 nm 0.3 1.8 6 Cerium oxide/100 nm 0.36 2.5
Table 5. Polishing pad parameters
View tableView in ArticleTable 5. Polishing pad parameters
Material Polyurethane Color Black Thickness/mm 0.8±0.1 Shore hardness (C) 81±5 Density/g·cm−3 0.5±0.1 Compression ratio （1.6±0.5)%
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Chao Yang, Naiwen Zhang, Yang Bai. High-efficiency and high-quality combined polishing method of zinc selenide crystal (invited)[J]. Infrared and Laser Engineering, 2022, 51(9): 20220531
Paper Information
Category: Special issue—Ultra precision manufacture and testing technology of optical aspheric surface
Received: Aug. 1, 2022
Accepted: --
Published Online: Jan. 6, 2023
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