Fig. 1. XRD patterns of AZO film annealed at different temperatures (the illustration shows the change of FWHM of ZnO (101) crystal face with annealing temperature)

Fig. 2. AFM images of AZO thin film annealed at different temperatures. (a) Unannealed sample; (b) annealed at 300 ℃; (c) annealed at 400 ℃; (d) annealed at 500 ℃; (e) annealed at 600 ℃

Fig. 3. Carrier concentration and mobility ratio of AZO thin films as a function of annealing temperature

Fig. 4. Absorption spectra of AZO thin film annealed at different temperatures (the illustration shows the optical bandgap of AZO thin samples)