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Chinese Journal of Lasers, Volume. 38, Issue 4, 408001(2011)

Integration Single-Frequency Laser Interferometer Used to Nanometer Measurement

Li Liyan*, Wang Jian, Han Chunyang, Yuan Yonggui, Wu Bing, Yang Jun, and Yuan Libo
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    Li Liyan, Wang Jian, Han Chunyang, Yuan Yonggui, Wu Bing, Yang Jun, Yuan Libo. Integration Single-Frequency Laser Interferometer Used to Nanometer Measurement[J]. Chinese Journal of Lasers, 2011, 38(4): 408001

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    Paper Information

    Category: measurement and metrology

    Received: Sep. 21, 2010

    Accepted: --

    Published Online: Mar. 24, 2011

    The Author Email: Li Liyan (llyswallow@126.com)

    DOI:10.3788/cjl201138.0408001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology