Chinese Journal of Lasers, Volume. 38, Issue 4, 408001(2011)
Integration Single-Frequency Laser Interferometer Used to Nanometer Measurement
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Li Liyan, Wang Jian, Han Chunyang, Yuan Yonggui, Wu Bing, Yang Jun, Yuan Libo. Integration Single-Frequency Laser Interferometer Used to Nanometer Measurement[J]. Chinese Journal of Lasers, 2011, 38(4): 408001
Paper Information
Category: measurement and metrology
Received: Sep. 21, 2010
Accepted: --
Published Online: Mar. 24, 2011
The Author Email: Liyan Li (llyswallow@126.com)
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