Journal of Synthetic Crystals, Volume. 54, Issue 5, 801(2025)
Effect of Heater Structure on Oxygen Impurities in Lightly Phosphorus-Doped Czochralski Monocrystalline Silicon with Ultra-Low Oxygen Content
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Runlong SHANG, Ya CHEN, Yang RUI, Liguang WANG, Cheng MA, Ran YI, Shaolin YANG. Effect of Heater Structure on Oxygen Impurities in Lightly Phosphorus-Doped Czochralski Monocrystalline Silicon with Ultra-Low Oxygen Content[J]. Journal of Synthetic Crystals, 2025, 54(5): 801
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Received: Dec. 20, 2024
Accepted: --
Published Online: Jul. 2, 2025
The Author Email: Shaolin YANG (slyang@nun.edu.cn)