Chinese Journal of Lasers, Volume. 51, Issue 16, 1602403(2024)
Femtosecond Laser Direct Writing of Bent Waveguides with High Curvature and Low Loss
[1] Ams M, Marshall G D, Spence D J et al. Slit beam shaping method for femtosecond laser direct-write fabrication of symmetric waveguides in bulk glasses[J]. Optics Express, 13, 5676-5681(2005).
[2] Ni J C, Liu S L, Chen Y et al. Direct observation of spin-orbit interaction of light via chiroptical responses[J]. Nano Letters, 22, 9013-9019(2022).
[3] Lin Z Y, Hong M H. Femtosecond laser precision engineering: from micron, submicron, to nanoscale[J]. Ultrafast Science, 2021, 9783514(2021).
[4] Long J, Jiao B Z, Fan X H et al. Femtosecond laser assembly of one-dimensional nanomaterials and their application[J]. Chinese Journal of Lasers, 48, 0202017(2021).
[5] Gross S, Riesen N, Love J D et al. Three-dimensional ultra-broadband integrated tapered mode multiplexers[J]. Laser & Photonics Reviews, 8, L81-L85(2014).
[6] Gross S, Withford M J. Ultrafast-laser-inscribed 3D integrated photonics: challenges and emerging applications[J]. Nanophotonics, 4, 332-352(2015).
[7] Liao J N, Wang X D, Zhou X W et al. Femtosecond laser direct writing of copper microelectrodes[J]. Chinese Journal of Lasers, 46, 1002013(2019).
[8] Roth G L, Kefer S, Hessler S et al. Polymer photonic crystal waveguides generated by femtosecond laser[J]. Laser & Photonics Reviews, 15, 2100215(2021).
[9] Zhang B, Li Z Q, Wang L et al. Research advances in laser crystal optical waveguides fabricated by femtosecond laser direct writing[J]. Laser & Optoelectronics Progress, 57, 111415(2020).
[10] Ding X C, Zhao Y, Hassan A et al. Femtosecond laser direct writing of optical overpass[J]. Micromachines, 13, 1158(2022).
[11] Cai C K, Wang J. Femtosecond laser-fabricated photonic chips for optical communications: a review[J]. Micromachines, 13, 630(2022).
[12] Zhou W P, Wang S T, Yu Y C et al. Research progress in fabrication of embedded microball lenses, energy devices and biosensors by femtosecond laser direct writing[J]. Chinese Journal of Lasers, 44, 0102002(2017).
[13] Bastos A R, Vicente C M S, Oliveira-Silva R et al. Integrated optical Mach-Zehnder interferometer based on organic-inorganic hybrids for photonics-on-a-chip biosensing applications[J]. Sensors, 18, 840(2018).
[14] Flamini F, Magrini L, Rab A S et al. Thermally reconfigurable quantum photonic circuits at telecom wavelength by femtosecond laser micromachining[J]. Light: Science & Applications, 4, e354(2015).
[15] Zhang P, Aungskunsiri K, Martín-López E et al. Reference-frame-independent quantum-key-distribution server with a telecom tether for an on-chip client[J]. Physical Review Letters, 112, 130501(2014).
[16] Mukherjee S, Rechtsman M C. Observation of Floquet solitons in a topological bandgap[J]. Science, 368, 856-859(2019).
[17] Arriola A, Gross S, Jovanovic N et al. Low bend loss waveguides enable compact, efficient 3D photonic chips[J]. Optics Express, 21, 2978-2986(2013).
[18] Liu Z M, Liao Y, Fang Z W et al. Suppression of bend loss in writing of three-dimensional optical waveguides with femtosecond laser pulses[J]. Science China Physics, Mechanics & Astronomy, 61, 070322(2018).
[19] Pätzold W M, Demircan A, Morgner U. Low-loss curved waveguides in polymers written with a femtosecond laser[J]. Optics Express, 25, 263-270(2017).
[20] Lee T, Sun Q, Beresna M et al. Low bend loss femtosecond laser written waveguides exploiting integrated microcrack[J]. Scientific Reports, 11, 23770(2021).
[21] Tan D Z, Zhang B, Qiu J R. Ultrafast laser direct writing in glass: thermal accumulation engineering and applications[J]. Laser & Photonics Reviews, 15, 2000455(2021).
[22] Gao F, Qin L, Chen Y Y et al. Research progress of bent waveguide and its applications[J]. Chinese Optics, 10, 176-193(2017).
[23] Heiblum M, Harris J. Analysis of curved optical waveguides by conformal transformation[J]. IEEE Journal of Quantum Electronics, 11, 75-83(1975).
[24] Melloni A, Carniel F, Costa R et al. Determination of bend mode characteristics in dielectric waveguides[J]. Journal of Lightwave Technology, 19, 571-577(2001).
[25] Hirao K, Miura K. Writing waveguides and gratings in silica and related materials by a femtosecond laser[J]. Journal of Non-Crystalline Solids, 239, 91-95(1998).
[26] Zoubir A, Lopez C, Richardson M et al. Femtosecond laser fabrication of tubular waveguides in poly(methyl methacrylate)[J]. Optics Letters, 29, 1840-1842(2004).
[27] Gui L, Xu B X, Chong T C. Microstructure in lithium niobate by use of focused femtosecond laser pulses[J]. IEEE Photonics Technology Letters, 16, 1337-1339(2004).
[28] Nolte S, Will M, Burghoff J et al. Femtosecond waveguide writing: a new avenue to three-dimensional integrated optics[J]. Applied Physics A, 77, 109-111(2003).
[29] Fernandez T T, Gross S, Arriola A et al. High performing designer glass platform to host versatile photonic devices[J]. APL Materials, 9, 121109(2021).
[30] She S X[M]. Fundamentals of guided wave optics and physics, 94-98(2002).
[31] Li Z Z, Li X Y, Yu F et al. Circular cross section waveguides processed by multi-foci-shaped femtosecond pulses[J]. Optics Letters, 46, 520-523(2021).
[32] Sun Q, Lee T, Beresna M et al. Control of laser induced cumulative stress for efficient processing of fused silica[J]. Scientific Reports, 10, 3819(2020).
[33] Chen Y Y, Yu J Z, Yan Q F et al. Analysis on influencing factors of bend loss of silicon-on-insulator waveguides[J]. Journal of Semiconductors, 26, 216-219(2005).
Get Citation
Copy Citation Text
Yichun Li, Kaiheng Xiao, Zhongtian Li, Chang Liu, Yanhao Yu, Zhennan Tian. Femtosecond Laser Direct Writing of Bent Waveguides with High Curvature and Low Loss[J]. Chinese Journal of Lasers, 2024, 51(16): 1602403
Category: Laser Micro-Nano Manufacturing
Received: Oct. 9, 2023
Accepted: Nov. 14, 2023
Published Online: Apr. 2, 2024
The Author Email: Yu Yanhao (yanhao_yu@jlu.edu.cn), Tian Zhennan (zhennan_tian@jlu.edu.cn)
CSTR:32183.14.CJL231264