Chinese Journal of Lasers, Volume. 51, Issue 16, 1602403(2024)

Femtosecond Laser Direct Writing of Bent Waveguides with High Curvature and Low Loss

Yichun Li, Kaiheng Xiao, Zhongtian Li, Chang Liu, Yanhao Yu*, and Zhennan Tian**
Author Affiliations
  • College of Electronic Science and Engineering, Jilin University, Changchun , Jilin 130012, China
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    Figures & Tables(8)
    Top view and simulated mode field distribution of straight waveguide and circular-arc bent waveguide. (a) Top view of straight waveguide and circular-arc bent waveguide; (b) simulated mode field distribution of straight waveguide; (c) simulated mode field distribution of circular-arc bent waveguide
    Schematic diagram of refractive index distribution of bent waveguides before and after conformal transformation, influence of n1-n2 on αr, and writing strategy of modification lines. (a) Refractive index distribution before and after conformal transformation without modification lines; (b) change of αr with n1-n2; (c) schematic diagram of writing strategy for modification lines; (d) refractive index distribution before and after conformal transformation when adding modification lines
    Simulation results of S-shaped bent waveguide. (a),(b) Cross-sectional refractive index distribution and bending loss simulation diagrams of bent waveguide without modification lines; (c),(d) cross-sectional refractive index distribution and bending loss simulation diagrams of bent waveguide with modification lines; (e) relationship between bending loss and curvature radius of bent waveguides with and without modification lines
    Optical microscope photos and mode field distribution pictures. (a1),(b1) Cross-sectional optical microscope photos of bent waveguide before and after adding modification line, respectively; (a2),(b2) mode field distribution pictures corresponding to (a1) and (b1), respectively; (a3),(b3) simulated mode field distribution images of bent waveguide before and after adding modification line, respectively
    Different schemes of writing order of waveguide and modification lines and their corresponding bending losses. (a) Schematic diagram of writing order of waveguide and modification lines; (b) bending losses of waveguides under different writing schemes
    Bending losses of waveguides under different R, P2, and dis. (a) Variation of bending loss with P2 and dis when R=10 mm; (b) variation of bending loss with P2 and dis when R=20 mm. Horizontal thick solid line and thin solid lines represent magnitude of bending loss for bent waveguide without modification lines and measurement error, respectively
    Bending losses of waveguide under different R, θ, and σ conditions. (a) Bending losses of waveguide under different R and θ conditions; (b) bending losses of waveguide under different R and σ conditions
    Bending losses of waveguide under different writing methods of modification lines, R and m. (a) Writing symmetrically on both sides; (b) only writing from outside of bend; (c),(d) optical microscope images of cross section of bent waveguide when two layers of modification lines are written on both sides and from outside of bending, respectively
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    Yichun Li, Kaiheng Xiao, Zhongtian Li, Chang Liu, Yanhao Yu, Zhennan Tian. Femtosecond Laser Direct Writing of Bent Waveguides with High Curvature and Low Loss[J]. Chinese Journal of Lasers, 2024, 51(16): 1602403

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    Paper Information

    Category: Laser Micro-Nano Manufacturing

    Received: Oct. 9, 2023

    Accepted: Nov. 14, 2023

    Published Online: Apr. 2, 2024

    The Author Email: Yu Yanhao (yanhao_yu@jlu.edu.cn), Tian Zhennan (zhennan_tian@jlu.edu.cn)

    DOI:10.3788/CJL231264

    CSTR:32183.14.CJL231264

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