Acta Optica Sinica, Volume. 35, Issue 1, 122005(2015)
A Mixed Gradient Algorithm for High Performance DOE Design in Off-Axis Lithography Illumination System
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Song Qiang, Zhu Jing, Wang Jian, Zhang Fang, Lü Xiangbo, Yang Baoxi, Huang Huijie. A Mixed Gradient Algorithm for High Performance DOE Design in Off-Axis Lithography Illumination System[J]. Acta Optica Sinica, 2015, 35(1): 122005
Category: Optical Design and Fabrication
Received: Jul. 1, 2014
Accepted: --
Published Online: Dec. 15, 2014
The Author Email: Song Qiang (songqiang@siom.ac.cn)