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Acta Optica Sinica, Volume. 35, Issue 1, 122005(2015)

A Mixed Gradient Algorithm for High Performance DOE Design in Off-Axis Lithography Illumination System

Song Qiang1,2、*, Zhu Jing1,2, Wang Jian1,2, Zhang Fang1,2, Lü Xiangbo1,2, Yang Baoxi1,2, and Huang Huijie1,2
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    Song Qiang, Zhu Jing, Wang Jian, Zhang Fang, Lü Xiangbo, Yang Baoxi, Huang Huijie. A Mixed Gradient Algorithm for High Performance DOE Design in Off-Axis Lithography Illumination System[J]. Acta Optica Sinica, 2015, 35(1): 122005

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    Paper Information

    Category: Optical Design and Fabrication

    Received: Jul. 1, 2014

    Accepted: --

    Published Online: Dec. 15, 2014

    The Author Email: Song Qiang (songqiang@siom.ac.cn)

    DOI:10.3788/aos201535.0122005

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology