Sub-Terahertz Measurement of Dielectric Properties Using Coplanar Waveguide

Ji Xu; Jiangtao Su; Laijun Liu; Jie Wang; Yongning He; Yongdong Li; Linghang Wang; Dawei Wang

doi:10.3788/CJL201946.0614037

Chinese Journal of Lasers, Volume. 46, Issue 6, 0614037(2019)

Sub-Terahertz Measurement of Dielectric Properties Using Coplanar Waveguide

Ji Xu^1,2, Jiangtao Su^、**, Laijun Liu^、***, Jie Wang¹, Yongning He⁴, Yongdong Li⁵, Linghang Wang⁶, and Dawei Wang^、*

Author Affiliations

¹ Ministry of Education Key Lab of RF Circuits and System, HangZhou DianZi University,Hangzhou, Zhejiang 310018, China

² School of Microelectronics and State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, Xi'an, Shaanxi 710049, China

⁴ School of Electronic and Information Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi 710049, China

⁵ Key Lab for Physical Electronics and Devices of the Ministry of Education, Xi'an Jiaotong University, Xi'an, Shaanxi 710049, China

⁶ Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education & International Center for Dielectric Research, School of Electronic and Information Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi 710049, China;

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Figures & Tables(9)

Fig. 1. Structural diagram of the CPW and the fabrication process of sample. (a) Structural diagram; (b) photoresist coating; (c) mask covering and exposure under ultraviolet lamp; (d) etching of unexposed part; (e) deposited Al electrode; (f) photoresist removing

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Fig. 2. Measurement platform with VNA

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Fig. 3. Schematic of measurement using probe

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Fig. 4. S-parameter model of 2-port network

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Fig. 5. Experimental sample

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Fig. 6. Calculated results of CPW on silica substrate

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Fig. 7. Flow chart of the analysis method

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Fig. 8. Calculated characteristic impedance and permittivities under different input ε'r. (a)(b) ε'r=10; (c)(d) ε'r=100; (e)(f) ε'r=1000

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Table 1. Calculation errors of model under different permittivities
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Table 1. Calculation errors of model under different permittivities
ε'_r Z'/Ω [E_min,E_max]
Z ε_r
10 43.3713 [0.4429%,3.6982%] [-1.8621%,3.3422%]
100 14.3173 [0.4431%,3.6983%] [-1.7657%,3.0101%]
1000 4.54798 [0.4430%,3.6982%] [-1.7561%,2.9769%]

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Ji Xu, Jiangtao Su, Laijun Liu, Jie Wang, Yongning He, Yongdong Li, Linghang Wang, Dawei Wang. Sub-Terahertz Measurement of Dielectric Properties Using Coplanar Waveguide[J]. Chinese Journal of Lasers, 2019, 46(6): 0614037

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