Laser Technology, Volume. 47, Issue 4, 480(2023)

Investigation on infrared laser-induced damage process of GaAs wafers based on scattering signal

JIA Zhichao1、*, LI Xinhua1, LI Zewen2, and NI Xiaowu2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    References(20)

    [1] [1] XIE X M, XU Q, CHEN J, et al. Research progress on antimonide based type-Ⅱ superlattice mid- and long-infrared detectors[J]. Laser Technology, 2020, 44(6): 688-694(in Chinese).

    [3] [3] SUN H, XU J M, ZHANG H Ch, et al. Simulation of three-junction GaAs solar cell temperature field by continuous wave laser irradiation[J]. Laser Technology, 2018, 42(2):239-244(in Chinese).

    [5] [5] SRIVASTAVA P K, SINGH A P, KAPOOR A. Theoretical analysis of pit formation in GaAs surfaces in picosecond and femtosecond laser ablation regimes[J]. Optics & Laser Technology, 2006, 38(8): 649-653.

    [6] [6] SINGH A P, KAPOOR A, TRIPATHI K N, et al. Effect of polarization on the surface damage morphology of GaAs single crystal during irradiation with picosecond laser pulses[J]. Optics & Laser Techno-logy, 2002, 34(1): 23-26.

    [7] [7] PRATAP S A, KAPOOR A, TRIPATHI K N, et al. Thermal and mechanical damage of GaAs in picosecond regime[J]. Optics & Laser Technology, 2001, 33(6): 363-369.

    [8] [8] KUANR A V, BANSAL S K, SRIVASTAVA G P. Laser induced damage in GaAs at 1.06 μm wavelength: Surface effects[J]. Optics & Laser Technology, 1996, 28(1): 25-34.

    [9] [9] GARG A, KAPOOR A, TRIPATHI K N. Laser-induced damage studies in GaAs[J]. Optics & Laser Technology, 2003, 35(1): 21-24.

    [10] [10] SARDAR D K, BECKER M F, WALSER R M. Multipulse laser damage of GaAs surfaces[J]. Journal of Applied Physics, 1987, 62(9): 3688-3693.

    [11] [11] SOLIS J, AFONSO C N, PIQUERAS J. Excimer laser melting of GaAs: Real-time optical study[J]. Journal of Applied Physics, 1992, 71(2): 1032-1034.

    [12] [12] WAUTELET M, van VECHTEN J A. Carrier diffusion in semiconductors subject to large gradients of excited carrier density[J]. Physical Review B, 1981, 23(10): 5551-5554.

    [13] [13] HUANG A L, BECKER M F, WALSER R M. Laser-induced damage and ion emission of GaAs at 1.064 m[J]. Applied Optics, 1986, 25(21): 3864-3870.

    [14] [14] QI H, WANG Q, ZHANG X, et al. Investigation on damage process of GaAs induced by 1064 nm continuous laser[J]. Journal of A-pplied Physics, 2008, 103(3): 033106.

    [15] [15] LI Z W, ZHANG H C, SHEN Z H, et al. Time-resolved temperature measurement and numerical simulation of millisecond laser irradiated silicon[J]. Journal of Applied Physics, 2013, 114(3): 033104.

    [16] [16] CHOI S, JHANG K Y. In situ detection of laser-induced slip initiation on the silicon wafer surface[J]. Optics Letters, 2014, 39(14): 4278-4281.

    [17] [17] L X M, LI Z W, ZHANG J M, et al. Surface damage study of silicon induced by combined millisecond and nanosecond laser with different delays[J]. Laser Technology, 2020, 44(6): 695-699(in Chinese).

    [19] [19] THIRD C E, WEINBERG F, YOUNG L. Mathematical model of internal temperature profile of GaAs during rapid thermal annealing[J]. Journal of Applied Physics, 1991, 69(12): 8037-8041.

    [20] [20] JIA Zh Ch, ZHANG T Zh, ZHU H Zh, et al. Stress damage process of silicon wafer under millisecond laser irradiation[J]. Chinese Optics Letters, 2018, 16(1):70-74.

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    JIA Zhichao, LI Xinhua, LI Zewen, NI Xiaowu. Investigation on infrared laser-induced damage process of GaAs wafers based on scattering signal[J]. Laser Technology, 2023, 47(4): 480

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    Paper Information

    Received: Jun. 24, 2022

    Accepted: --

    Published Online: Dec. 11, 2023

    The Author Email: JIA Zhichao (jiazhichaonjust@163.com)

    DOI:10.7510/jgjs.issn.1001-3806.2023.04.006

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