Acta Optica Sinica, Volume. 41, Issue 6, 0612002(2021)
Long Trace Profiler for Measuring Groove Density of Diffraction Gratings
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Xinpu Wu, Huaikun Wei, Zhengkun Liu, Keqiang Qiu, Xiangdong Xu, Yilin Hong. Long Trace Profiler for Measuring Groove Density of Diffraction Gratings[J]. Acta Optica Sinica, 2021, 41(6): 0612002
Category: Instrumentation, Measurement and Metrology
Received: Sep. 18, 2020
Accepted: Nov. 5, 2020
Published Online: Apr. 7, 2021
The Author Email: Liu Zhengkun (zhkliu@ustc.edu.cn)