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Acta Optica Sinica, Volume. 41, Issue 6, 0612002(2021)

Long Trace Profiler for Measuring Groove Density of Diffraction Gratings

Xinpu Wu, Huaikun Wei, Zhengkun Liu*, Keqiang Qiu, Xiangdong Xu, and Yilin Hong
Author Affiliations
  • National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei, Anhui 230029, China
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    Article index updated: Mar. 10, 2025

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    Xinpu Wu, Huaikun Wei, Zhengkun Liu, Keqiang Qiu, Xiangdong Xu, Yilin Hong. Long Trace Profiler for Measuring Groove Density of Diffraction Gratings[J]. Acta Optica Sinica, 2021, 41(6): 0612002

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Sep. 18, 2020

    Accepted: Nov. 5, 2020

    Published Online: Apr. 7, 2021

    The Author Email: Liu Zhengkun (zhkliu@ustc.edu.cn)

    DOI:10.3788/AOS202141.0612002

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology