[1] Ling N, Chen D H, Yu J L et al. Two-dimensional piezoelectric fast steering mirror with large aperture and angular displacement[J]. Chinese Journal of Quantum Electronics, 15, 206-211, 217(1998).

[2] Li X Y, Ling N, Chen D H et al. Stable control of the fast steering mirror in adaptive optics system[J]. High Power Laser & Particle Beams, 11, 31-36(1999).

[3] Loney G C. Design of a small-aperture steering mirror for high bandwidth acquisition and tracking[J]. Optical Engineering, 29, 1360-1365(1990).

[4] Jiang W H, Zhang Y D, Rao C H et al. Progress on adaptive optics of the Institute of Optics and Electronics, Chinese Academy of Sciences[J]. Acta Optica Sinica, 31, 0900106(2011).

[5] Zhao L, Ji M, Zhao Z H et al. Primary-precise compounded control for stabilized platform in shipborne laser weapon[J]. Laser & Infrared, 49, 86-92(2019).

[6] Martinache F, Guyon O, Clergeon C et al. The Subaru coronagraphic extreme AO project: first observations[J]. Proceedings of SPIE, 8447, 84471Y(2012).

[7] Sun P F. High angular resolution tilt mirror for ground-based telescope[D]. Hefei: University of Science and Technology of China(2018).

[8] Yang K J, Yang P, Chen S Q et al. Vibration identification based on Levenberg-Marquardt optimization for mitigation in adaptive optics systems[J]. Applied Optics, 57, 2820-2826(2018).

[9] Meline M E, Harrell J P, Lohnes K A. Universal beam steering mirror design using the cross blade flexure[J]. Proceedings of SPIE, 1697, 424-442(1992).

[11] Germann L M. Fine-steering mirror technology supports 10 nanoradian systems[J]. Optical Engineering, 29, 1351-1359(1990).

[12] Pei P H, Su J, Suo T et al. Research on optical beam jitter active control technology[J]. Measurement & Control Technology, 38, 122-127(2019).

[13] Fan G B. Light-beam stability and vibration control of opto-mechatronics systems Xi'an:[D]. Xidian University(2004).

[14] Fan M W, Huang L H, Li M et al. High-bandwidth control of piezoelectric steering mirror for suppression of laser beam jitter[J]. Acta Physica Sinica, 65, 024209(2016).

[15] Li X Y, Jiang W H. Effective bandwidth analysis of adaptive optics control system[J]. Acta Optica Sinica, 17, 1697-1702(1997).

[16] Zhou R, Li X Y, Shen F et al. Laser beam stabilizing system based on close loop control of two fast steering mirrors in series[J]. Acta Optica Sinica, 36, 1214002(2016).

[17] Pedreiro N. Spacecraft architecture for disturbance-free payload[J]. Journal of Guidance Control & Dynamics, 26, 794-804(2003).

[18] Aubrun J N, Lorell K R, Feher G J et al. Design of the infrared fast steering mirror chopping control system for the Keck II Telescope[J]. Proceedings of SPIE, 3352, 687-698(1998).

[19] Bullard A, Shawki I. Responder fast steering mirror[J]. Proceedings of SPIE, 8836, 883606(2013).

[20] Patterson K, Shields J, Wang X et al. Control design for momentum-compensated fast steering mirror for WFIRST-AFTA coronagraph instrument[J]. Proceedings of SPIE, 9605, 96052C(2015).

[21] Lee S, Cho M K, Park C et al. Development of the fast steering secondary mirror assembly of GMT[J]. Proceedings of SPIE, 9912, 991241(2016).

[22] Dong Z C, Jiang A M, Dai Y F et al. Space-qualified fast steering mirror for an image stabilization system of space astronomical telescopes[J]. Applied Optics, 57, 9307-9315(2018).

[23] Wei S H. Research on characteristic and application of generating electricity with piezoelectric ceramic[J]. Dalian: Dalian University of Technology(2008).

[24] Zhang C Z. Development of piezoelectric materials and their applications[J]. Piezoelectrics & Acoustooptics, 15, 64-70(1993).

[25] Meitzler A H, Berlincourt D, Welsh F S. 176-1987-IEEE standard on piezoelectricity[S]. New York: IEEE(1988).