Fig. 1. Physical model of rigid-flexible coupling multibody system of PFSM. (a) Rigid-flexible coupling model; (b) flexure hinge model and corresponding coupling nodes

Fig. 2. Modal shapes of PFSM central flexure hinge. (a) Seventh mode shape; (b) eighth mode shape;(c) ninth mode shape; (d) tenth mode shape

Fig. 3. Sinusoidal signal of piezoelectric actuator and hot spot stress of central hinge.(a) Sinusoidal displacement signal of piezoelectric actuator; (b) hot spot stress of central hinge

Fig. 4. Reaction force characteristics of PFSM at different driving frequencies.(a) 50 Hz; (b) 80 Hz; (c) 100 Hz; (d) 120 Hz

Fig. 5. Mesh model of actuator and deflection shape of PFSM. (a) Finite element mesh model and voltage loading model of actuator; (b) deflection shape of PFSM

Fig. 6. Reaction force based on piezoelectric coupling simulation. (a) 50 Hz; (b) 80 Hz; (c) 100 Hz; (d) 120 Hz

Fig. 7. Reaction force of PFSM before and after compensation based on piezoelectric coupling calculation. (a) 50 Hz; (b) 80 Hz; (c) 100 Hz; (d) 120 Hz

Fig. 8. 320 mm aperture PFSM with reaction force test system. (a) 320 mm aperture PFSM; (b) reaction force test system

Fig. 9. Tested reaction force before and after compensation. (a) 50 Hz; (b) 80 Hz; (c) 100 Hz; (d) 120 Hz