Fig. 1. (a) Sensitivity and resonant frequency of the membrane with difference tensile strain; (b) frequency response of the membrane with different densities.

Fig. 2. Simulation results of three-beam interference: (a) the original interference spectrum and its Fourier transform; (b) the interference extinction ratio under different FP cavity lengths L.

Fig. 3. Schematic diagram of membrane fabrication.

Fig. 4. (a) Schematic diagram of sensor structure; (b) photo of the SiN-MEMS sensor; (c) reflection spectrum and spatial frequency spectrum of the sensor.

Fig. 5. (a) Experimental setup of frequency response testing; (b) picture of the low-frequency comparison coupler.

Fig. 6. (a) Result of acoustic signal demodulation of SiN-MEMS sensor; (b) FFT spectra of demodulation results.

Fig. 7. (a) SNR of FFT result; (b) phase sensitivity and noise characteristics of SiN-MEMS sensor; (c) sensitivity comparison of simulation to experimental data.