Low-frequency acoustic Fabry–Pérot fiber sensor based on a micromachined silicon nitride membrane

Zhiyuan Qu; Ping Lu; Yujian Li; Xin Fu; Wanjin Zhang; Deming Liu; Jiangshan Zhang

doi:10.3788/COL202018.101201

Chinese Optics Letters, Volume. 18, Issue 10, 101201(2020)

Low-frequency acoustic Fabry–Pérot fiber sensor based on a micromachined silicon nitride membrane

Zhiyuan Qu¹, Ping Lu^1、*, Yujian Li¹, Xin Fu¹, Wanjin Zhang¹, Deming Liu¹, and Jiangshan Zhang²

¹Wuhan National Laboratory for Optoelectronics (WNLO) and National Engineering Laboratory for Next Generation Internet Access System, School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China

²Department of Electronics and Information Engineering, Huazhong University of Science and Technology, Wuhan 430074, China

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Zhiyuan Qu, Ping Lu, Yujian Li, Xin Fu, Wanjin Zhang, Deming Liu, Jiangshan Zhang, "Low-frequency acoustic Fabry–Pérot fiber sensor based on a micromachined silicon nitride membrane," Chin. Opt. Lett. 18, 101201 (2020)

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Paper Information

Category: Optical Sensing, Measurements, and Metrology

Received: May. 11, 2020

Accepted: Jun. 23, 2020

Published Online: Sep. 1, 2020

The Author Email: Ping Lu (pluriver@mail.hust.edu.cn)

DOI:10.3788/COL202018.101201

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