Journal of Synthetic Crystals, Volume. 54, Issue 3, 407(2025)

Preparation and Properties of 3~4 Inch Fe Doped β-Ga2O3 Single Crystal with High Resistance

HUO Xiaoqing, ZHANG Shengnan, ZHOU Jinjie, WANG Yingmin, CHENG Hongjuan*, and SUN Qisheng
Author Affiliations
  • CETC Key Laboratory of Advanced Semiconductor Crystal Materials and Technologies, The 46th Research Institute, CETC, Tianjin 300220, China
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    Ultra-wide bandgap semiconductor β-Ga2O3 single crystal, which has excellent high breakdown field and low-cost potential, has attracted extensive attention from researchers. In this paper, 3~4 inch (1 inch=2.54 cm) Fe-doped β-Ga2O3 single crystals were grown by edge-defined film-fed growth method, the maximum length of which is 270 mm. A single crystals ingot could be cut to several bulk crystals with the large size, which effectively reduced the crystal growth cost. The electrical, optical and high-resolution X-ray diffraction full width at half maximum of the grown crystals were tested and analyzed. The data indicates good consistency in the electrical, optical, and XRD full width at half maximum of the wafers, demonstrating excellent crystal quality. Furthermore, the performance of a series of Fe-doped β-Ga2O3 single crystals were studied to analyze the influence of the Fe element on the quality, band gap and lattice vibration of β-Ga2O3 single crystals. It is found that, all the Fe-doped β-Ga2O3 single crystals have good crystalline quality. Fe doping can widen the bandgap of β-Ga2O3 single crystals, and meanwhile, induce a slight tensile stress in β-Ga2O3 single crystals. This paper will provide data support for substrate epitaxy and device verification.

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    HUO Xiaoqing, ZHANG Shengnan, ZHOU Jinjie, WANG Yingmin, CHENG Hongjuan, SUN Qisheng. Preparation and Properties of 3~4 Inch Fe Doped β-Ga2O3 Single Crystal with High Resistance[J]. Journal of Synthetic Crystals, 2025, 54(3): 407

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    Paper Information

    Category:

    Received: Jan. 13, 2025

    Accepted: Apr. 23, 2025

    Published Online: Apr. 23, 2025

    The Author Email: CHENG Hongjuan (xiemn08@126.com)

    DOI:10.16553/j.cnki.issn1000-985x.2025.0010

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