Fig. 1. Diffraction efficiency of zone plate with different thicknesses

Fig. 2. Layout of zone plate after modification

Fig. 3. Process flow of fabrication of hard X-ray zone plate

Fig. 4. Photo of hard X-ray zone plate and SEM images. (a) Photo of hard X-ray zone plate; (b) SEM image of outmost zones; (c) SEM image of inner zones (tilt angle is 20°); (d) SEM image of outer rings (tilt angle is 20°)