Acta Optica Sinica (Online), Volume. 2, Issue 19, 1913001(2025)

Design and Fabrication of High Efficiency Hard X-ray Fresnel Zone Plate (Invited)

Yilei Hua*, Jiebin Niu, and Hailiang Li
Author Affiliations
  • State Key Laboratory of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China
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    We design and fabricate a hard X-ray Fresnel zone plate with high diffraction efficiency for the imaging application of synchrotron radiation. By evaluating the influencing factors of the diffraction efficiency of zone plate, the relevant parameters of the zone plate are determined, and the zone plate on a hollowed-out silicon nitride substrate is fabricated by electron beam lithography and electroplating methods. The width of the outmost zone is 65 nm, the thickness of the zone plate is 1.64 μm, and the aspect ratio of the outmost ring is 25. The side wall of the zone is smooth and straight. This zone plate can be used for hard X-ray imaging in the 5?10 keV range.

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    Yilei Hua, Jiebin Niu, Hailiang Li. Design and Fabrication of High Efficiency Hard X-ray Fresnel Zone Plate (Invited)[J]. Acta Optica Sinica (Online), 2025, 2(19): 1913001

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    Paper Information

    Category: Terahertz, Infrared, Deep UV, Extreme UV, Soft X-ray, and X-ray Optics

    Received: Jun. 18, 2025

    Accepted: Jun. 30, 2025

    Published Online: Aug. 11, 2025

    The Author Email: Yilei Hua (huayilei@ime.ac.cn)

    DOI:10.3788/AOSOL250478

    CSTR:32394.14.AOSOL250478

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