Laser & Optoelectronics Progress, Volume. 62, Issue 9, 0912005(2025)
Chip Warpage Detection System Based on Fringe Structured Light
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Zijian Fan, Wanyuan Cai, Na Lü, Wei Tao. Chip Warpage Detection System Based on Fringe Structured Light[J]. Laser & Optoelectronics Progress, 2025, 62(9): 0912005
Category: Instrumentation, Measurement and Metrology
Received: Dec. 31, 2024
Accepted: Feb. 12, 2025
Published Online: Apr. 21, 2025
The Author Email: Na Lü (nana414526@sjtu.edu.cn), Wei Tao (taowei@sjtu.edu.cn)
CSTR:32186.14.LOP242538