Laser & Optoelectronics Progress, Volume. 62, Issue 9, 0912005(2025)

Chip Warpage Detection System Based on Fringe Structured Light

Zijian Fan, Wanyuan Cai, Na Lü*, and Wei Tao**
Author Affiliations
  • Department of Instrument Science and Engineering, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China
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    Zijian Fan, Wanyuan Cai, Na Lü, Wei Tao. Chip Warpage Detection System Based on Fringe Structured Light[J]. Laser & Optoelectronics Progress, 2025, 62(9): 0912005

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Dec. 31, 2024

    Accepted: Feb. 12, 2025

    Published Online: Apr. 21, 2025

    The Author Email: Na Lü (nana414526@sjtu.edu.cn), Wei Tao (taowei@sjtu.edu.cn)

    DOI:10.3788/LOP242538

    CSTR:32186.14.LOP242538

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