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Journal of Synthetic Crystals, Volume. 51, Issue 2, 333(2022)

Research Progress on Wet Etching of Semiconductor SiC

ZHANG Xuqing1,2、*, LUO Hao1, LI Jiajun2, WANG Rong2, YANG Deren1,2, and PI Xiaodong1,2
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    ZHANG Xuqing, LUO Hao, LI Jiajun, WANG Rong, YANG Deren, PI Xiaodong. Research Progress on Wet Etching of Semiconductor SiC[J]. Journal of Synthetic Crystals, 2022, 51(2): 333

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    Paper Information

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    Received: Aug. 20, 2021

    Accepted: --

    Published Online: Mar. 24, 2022

    The Author Email: Xuqing ZHANG (zhang_xuqing@zju.edu.cn)

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology