Acta Optica Sinica, Volume. 44, Issue 4, 0400003(2024)

Research and Development of SiC Ceramic Fabrication Technologies for Optics and Fine Structures

Ge Zhang1,2、*, Congcong Cui1,2, Wei Li1,2, Binchao Dong3, Qi Cao3, Lixun Zhou3, Conghui Guo1,2, Wei Zhang1,2, Chuanxiang Xu1,2, Wanli Zhu1,2, and Jianxun Bao1,2、**
Author Affiliations
  • 1Changchun Institute of Optics, Fine Mechanics and Physics, China Academy of Sciences, Changchun 130033, Jilin , China
  • 2Key Laboratory of Optical System Advanced Manufacturing Technology, Chinese Academy of Sciences, Changchun 130033, Jilin , China
  • 3Changchun Changguang KingCera Composites Co. Ltd., Changchun 130033, Jilin , China
  • show less
    References(119)

    [1] Williams S, Deny P. Overview of the production of sintered SiC optics and optical sub-assemblies[J]. Proceedings of SPIE, 5868, 586804(2005).

    [2] Rey J J, Wellman J A, Egan R G et al. A low cost, high performance, 1.2 m off-axis telescope built with NG-Xinetics silicon carbide[J]. Proceedings of SPIE, 8146, 81460N(2011).

    [4] Liu T, Zhou Y M, Jiang Y S. Research and application of foreign space mirror materials[J]. Spacecraft Recovery & Remote Sensing, 34, 90-99(2013).

    [5] Sein E, Toulemont Y, Safa F et al. A Φ 3.5 m diameter SiC telescope for Herschel mission[J]. Proceedings of SPIE, 4850, 606-618(2003).

    [6] Zhang X J, Hu H X, Wang X K et al. Challenges and strategies in high-accuracy manufacturing of the world’s largest SiC aspheric mirror[J]. Light, Science & Applications, 11, 310(2022).

    [7] Luo X G. High-precision fabrication of 4 m SiC aspheric mirror[J]. Light, Science & Applications, 12, 4(2023).

    [8] Rey J, Wirth A, Jankevics A et al. A deployable, annular, 30 m telescope, space-based observatory[J]. Proceedings of SPIE, 9143, 914318(2014).

    [9] Bougoin M. SIC material and technology for space optics[J]. Proceedings of SPIE, 10569, 105691U(2017).

    [10] Zhang G, Feng X G. Development of silicon carbide mirrors[J]. Optics and Precision Engineering, 21, 38-44(2013).

    [11] Li C R, Xie Z P, Kang G X et al. Research and application progress of SiC ceramics: a review[J]. Bulletin of the Chinese Ceramic Society, 39, 1353-1370(2020).

    [12] Li C R, Xie Z P, Zhao L. Research and application of sintering technologies for SiC ceramic materials: a review[J]. Journal of Ceramics, 41, 137-149(2020).

    [13] Levallois F, Bougoin M, Castel D. CTE homogeneity, isotropy and reproducibility in large parts made of sintered SiC[J]. Proceedings of SPIE, 10564, 1056410(2017).

    [14] Toulemont Y, Passvogel T, Pilbratt G et al. The 3.5 m all SiC telescope for Herschel[J]. Proceedings of SPIE, 0554, 341-348(2004).

    [15] Pilbratt G L. Herschel mission overview and key programmes[J]. Proceedings of SPIE, 7010, 701002(2008).

    [16] de Bruijne J H J. Science performance of Gaia, ESA’s space-astrometry mission[J]. Astrophysics and Space Science, 341, 31-41(2012).

    [17] Breysse J, Castel D, Bougoin M. All-SiC telescope technology at EADS ASTRIUM: big step forward for space optical payloads[J]. Proceedings of SPIE, 10564, 1056442(2019).

    [18] Bath D A, Spain D, Ness E et al. Evaluation of segmented and brazed mirror assemblies[J]. Proceedings of SPIE, 5868, 586805(2005).

    [20] Huang Z R, Liu G L, Liu X J et al. Manufacture of large-scale lightweight SiC mirror for space[J]. Proceedings of SPIE, 8335, 83351R(2012).

    [21] Liu M, Yang Y, Wei Y Q et al. Preparation of dense and high-purity SiC ceramics by pressureless solid-state-sintering[J]. Ceramics International, 45, 19771-19776(2019).

    [22] Zhang J X, Jiang D L, Lin Q L et al. Properties of silicon carbide ceramics from gelcasting and pressureless sintering[J]. Materials & Design, 65, 12-16(2015).

    [23] Zhang J X, Jiang D L, Lin Q L et al. Gelcasting and pressureless sintering of silicon carbide ceramics using Al2O3-Y2O3 as the sintering additives[J]. Journal of the European Ceramic Society, 33, 1695-1699(2013).

    [24] Li X H, Yan Q Z, Cao M Q et al. The influence of granulation on the gelcasting of pressureless-sintered silicon carbide ceramics[J]. Ceramics International, 40, 7245-7251(2014).

    [25] Cao C, Gao S Y, Sun Y et al. Fabrication of complicated silicon carbide ceramic components by acrylate gel-casting[J]. Journal of Ceramic Science and Technology, 12, 37-48(2021).

    [26] Liu Y, Zhang H, Liu L M et al. Preparation and environmental simulation tests of large-size silicon carbide brazed reflection mirrors[J]. Opto-Electronic Engineering, 47, 200088(2020).

    [27] Suyama S, Itoh Y. NTSIC (new technology silicon carbide): evaluation of microstructure of high-strength reaction-sintered silicon carbide for optical mirror[J]. Proceedings of SPIE, 6666, 66660K(2007).

    [28] Rey J J, Wellman J A, Egan R G et al. A low cost, high performance, 1.2 m off-axis telescope built with NG-Xinetics silicon carbide[J]. Proceedings of SPIE, 8146, 81460N(2011).

    [30] Ealey M A, Wellman J A, Weaver G Q. CERAFORM SiC: roadmap to 2 m and 2 kg/m2 areal density[J]. Proceedings of SPIE, 10289, 1028906(1997).

    [31] Robichaud J, Sampath D, Wainer C et al. Silicon carbide optics for space and ground based astronomical telescopes[J]. Proceedings of SPIE, 8450, 845002(2012).

    [32] Schwartz J, Arneson A, Robichaud J. Production of extreme ultraviolet (EUV) quality silicon carbide (SiC) aspheric optics[J]. Proceedings of SPIE, 7018, 70180U(2008).

    [33] Catropa D, Azad F. State-of-the-art silicon carbide optical telescope assembly for the JMAPS mission[J]. Proceedings of SPIE, 8837, 88370G(2013).

    [34] Tsuno K, Oono K, Irikado H et al. NTSIC: progress in recent two years[J]. Proceedings of SPIE, 6666, 66660J(2007).

    [35] Suyama S, Itoh Y. High-strength reaction-sintered silicon carbide for large-scale mirrors-effect of surface oxide layer on bending strength[J]. Advances in Science and Technology, 63, 374-382(2010).

    [36] Geyl R, Leplan H, Rodolfo J. TMA optics for HISUI HSS and MSS imagers[J]. Proceedings of SPIE, 8169, 816905(2011).

    [37] Devilliers C, Kroedel M. Cesic: optomechanical technology last development results and new HBCesic highly light weighted space mirror development including corrective function 7th international conference on space optics, October 2008[J]. Proceedings of SPIE, 10566, 105660N(2017).

    [38] Enya K, Yamada N, Imai T et al. High-precision CTE measurement of hybrid C/SiC composite for cryogenic space telescopes[J]. Cryogenics, 52, 86-89(2012).

    [39] Kaneda H, Naitoh M, Nakagawa T et al. Manufacturing and optical testing of 800 mm lightweight all C/SiC optics[J]. Proceedings of SPIE, 8837, 88370I(2013).

    [40] Grinchuk P S, Kiyashko M V, Abuhimd H M et al. Advanced technology for fabrication of reaction-bonded SiC with controlled composition and properties[J]. Journal of the European Ceramic Society, 41, 5813-5824(2021).

    [41] Wei M K, Zhang G J, Wu Q D. Processing of highly concentrated polyacrylamide-coated silicon carbide suspensions[J]. Ceramics International, 30, 125-131(2004).

    [42] Wu Q D, Yang C C, Zhang H Q et al. Fabrication and characterization of reaction-bonded silicon carbide with poly(methyl methacrylate) as pore-forming agent[J]. Ceramics International, 39, 5295-5302(2013).

    [43] Wu Q D, Liu K S, Tu L et al. Effects of molding methods on microstructure and strength of RBSC[J]. Journal of Ceramics, 32, 407-411(2011).

    [44] Liu H L, Huo Y L, Wang C P et al. Gel casting of large-sized, complex-shaped RBSC component[J]. Key Engineering Materials, 512/513/514/515, 395-398(2012).

    [45] Hu C Q, Liu H L, Huang X T et al. Microstructure and mechanical properties of reaction sintered silicon carbide[J]. China Ceramic Industry, 27, 7-11(2020).

    [46] Liu H L, Huo Y L, Hu C Q et al. Preparation of high precision SiC components for lithography equipment[J]. Advanced Ceramics, 37, 168-178(2016).

    [47] Zhang G, Zhao R C, Zhao W X. Gel-casting of large-scale lightweight SiC mirror blank[J]. Rare Metal Materials and Engineering, 37, 678-681(2008).

    [48] Zhao W X, Zhang G, Zhao R C et al. Fabrication of silicon carbide lightweight mirror blank[J]. Optics and Precision Engineering, 19, 2609-2617(2011).

    [49] Zhang G. Gelcasting process of 1.5 m SiC ceramic green body[J]. Optics and Precision Engineering, 21, 2989-2993(2013).

    [50] Cui C C, Dong B C, Zhang G. Drying behavior of gel cast SiC green body in ethanol[C](2016).

    [51] Zhao W X, Zhang G. Study on sintering process of ultra-large-scale lightweight SiC mirror blank[J]. Bulletin of the Chinese Ceramic Society, 33, 2838-2842(2014).

    [52] Zhang G. Study on join method of reaction bonded silicon carbide green body[J]. Infrared and Laser Engineering, 43, 193-196(2014).

    [53] Dong B C, Zhang G. Fabrication and properties of ultra-lightweight SiC mirror[J]. Optics and Precision Engineering, 23, 2185-2191(2015).

    [54] Gao J S, Shen Z F, Wang X Y et al. Research on surface modification of space used SiC mirror[J]. Acta Optica Sinica, 29, 2624-2629(2009).

    [55] Guan K, Zeng Q F, Liu Y S et al. A multiscale model for CVD growth of silicon carbide[J]. Computational Materials Science, 196, 110512(2021).

    [56] Reagan P. Chemical vapor composites (CVC)[J]. Le Journal De Physique IV, 3, C3-541-C3-548(1993).

    [57] Bolton L. Process for making triple graded CVC-CVD-CVC silicon carbide products[P].

    [58] Casstevens J, Rashed A, Plummer R et al. Silicon carbide high performance optics: a cost-effective, flexible fabrication process[J]. Proceedings of SPIE, 4451, 458-467(2001).

    [59] Plummer R, Bray D. Guidelines for design of SuperSiC silicon carbide mirror substrates and precision components[J]. Proceedings of SPIE, 4771, 265-275(2002).

    [60] Duston C, Woestman K, Vargas H et al. Converted silicon carbide technology developments for optics[J]. Proceedings of SPIE, 6666, 66660I(2007).

    [61] Webb K. Advances in fabrication technologies for light weight CVC SiC mirrors[J]. Proceedings of SPIE, 6666, 666606(2007).

    [62] Fischer W F, Foss C A,. CVC silicon carbide high-performance optical systems[J]. Proceedings of SPIE, 5523, 290-299(2004).

    [63] Tanaka C T, Webb K. Chemical vapor composite silicon carbide for space telescopes[J]. Proceedings of SPIE, 6265, 62652Q(2006).

    [64] Casstevens J, Bray D J, Rashed A et al. Rapid fabrication of large mirror substrates by conversion joining of silicon carbide[J]. Proceedings of SPIE, 5868, 586801(2005).

    [65] Mici J, Rothenberg B, Brisson E et al. Optomechanical performance of 3D-printed mirrors with embedded cooling channels and substructures[J]. Proceedings of SPIE, 9573, 957306(2015).

    [66] Zhang C H, Li Z X. A review of lightweight design for space mirror core structure: tradition and future[J]. Machines, 10, 1066(2022).

    [67] Zhang K, Qu H M, Guan H J et al. Design and fabrication technology of metal mirrors based on additive manufacturing: a review[J]. Applied Sciences, 11, 10630(2021).

    [68] Sun Y X, Fan Y C, Dong D Y et al. A review of space mirror topology optimization technology based on additive manufacturing[J]. Laser Journal, 43, 1-14(2022).

    [69] Goodman W A. A review on the advances in 3D printing and additive manufacturing of ceramics and ceramic matrix composites for optical applications[J]. Proceedings of SPIE, 10372, 103720B(2017).

    [70] Liu H F, Su H J, Shen Z L et al. One-step additive manufacturing and microstructure evolution of melt-grown Al2O3/GdAlO3/ZrO2 eutectic ceramics by laser directed energy deposition[J]. Journal of the European Ceramic Society, 41, 3547-3558(2021).

    [71] Exner H, Horn M, Streek A et al. Laser micro sintering: a new method to generate metal and ceramic parts of high resolution with sub-micrometer powder[J]. Virtual and Physical Prototyping, 3, 3-11(2008).

    [72] Eckel Z C, Zhou C Y, Martin J H et al. Additive manufacturing of polymer-derived ceramics[J]. Science, 351, 58-62(2016).

    [73] Chen H H, Wang X F, Xue F D et al. 3D printing of SiC ceramic: direct ink writing with a solution of preceramic polymers[J]. Journal of the European Ceramic Society, 38, 5294-5300(2018).

    [74] Mostafaei A, Elliott A M, Barnes J E et al. Binder jet 3D printing: process parameters, materials, properties, modeling, and challenges[J]. Progress in Materials Science, 119, 100707(2021).

    [75] Fleisher A, Zolotaryov D, Kovalevsky A et al. Reaction bonding of silicon carbides by Binder Jet 3D-Printing, phenolic resin binder impregnation and capillary liquid silicon infiltration[J]. Ceramics International, 45, 18023-18029(2019).

    [76] Goodman W A[P]. 3D printing of silicon carbide structures.

    [77] Goodman B A. 3D printed silicon carbide scalable to meter-class segments for Origins Space Telescope[J]. Proceedings of SPIE, 11819, 118190J(2021).

    [78] Goodman B A. The results of Goodman Technologies NASA Phase II SBIRs for additive manufacturing of mirrors and telescopes[J]. Proceedings of SPIE, 11487, 1148705(2020).

    [79] Ding G J, He R J, Zhang K Q et al. Stereolithography 3D printing of SiC ceramic with potential for lightweight optical mirror[J]. Ceramics International, 46, 18785-18790(2020).

    [80] He R J, Zhou N P, Zhang K Q et al. Development and challenges of additive manufacturing of SiC ceramic[J]. Advanced Ceramics, 42, 1-42(2021).

    [81] Hu C Q, Chen Y F, Yang T S et al. Effect of SiC powder on the properties of SiC slurry for stereolithography[J]. Ceramics International, 47, 12442-12449(2021).

    [82] Hu C Q. Study on the Additive Manufacturing technology of Silicon Carbide Ceramics based on UV curing[D], 19-23(2021).

    [83] Zhang H, Yang Y, Hu K H et al. Stereolithography-based additive manufacturing of lightweight and high-strength Cf/SiC ceramics[J]. Additive Manufacturing, 34, 101199(2020).

    [84] Tang J, Chang H T, Guo X T et al. Preparation of carbon fiber-reinforced SiC ceramics by stereolithography and secondary silicon infiltration[J]. Ceramics International, 48, 25159-25167(2022).

    [85] Tang J, Liu M, Wei Y Q et al. An efficient and low-cost liquid silicon infiltration method to prepare SiC-coated carbon short fiber for fiber protection of Cf/SiC ceramic matrix composites[J]. Ceramics International, 47, 13235-13241(2021).

    [86] Li F F, Ma N N, Chen J et al. SiC ceramic mirror fabricated by additive manufacturing with material extrusion and laser cladding[J]. Additive Manufacturing, 58, 102994(2022).

    [87] Wang J. After 11 years of research, the "Space Eye" Vulcan product was successfully launched with a satellite[N]. Ningbo Evening News, A10.

    [88] Wang C S, Wu S Q, Yan C Z et al. Research and applications of additive manufacturing technology of SiC ceramics[J]. Chinese Science Bulletin, 67, 1137-1154(2022).

    [89] Liu J, Fu W H, Liu K et al. The preparation methods of the SiC ceramic components via selective laser sintering process[P].

    [90] Yan C Z, Zhu W, Fu H et al. Method of preparing carbon fiber reinforced carbon-silicon carbide composite part[P].

    [91] Feng K H, Hu S D, Li L Y et al. Preparation of low residual silicon content Si-SiC ceramics by binder jetting additive manufacturing and liquid silicon infiltration[J]. Journal of the European Ceramic Society, 43, 5446-5457(2023).

    [93] Hu X F, Niu F R, Zhou Z et al. Effect of fused deposition modeling (FDM) process parameters on microstructure and mechanical properties of SiC ceramics[J]. Cemented Carbide, 38, 201-210(2021).

    [94] Li W, Cui C C, Bao J X et al. Properties regulation of SiC ceramics prepared via stereolithography combined with reactive melt infiltration techniques[J]. Ceramics International, 47, 33997-34004(2021).

    [95] He R J, Zhou N P, Zhang K Q et al. Progress and challenges towards additive manufacturing of SiC ceramic[J]. Journal of Advanced Ceramics, 10, 637-674(2021).

    [96] Lakhdar Y, Tuck C, Binner J et al. Additive manufacturing of advanced ceramic materials[J]. Progress in Materials Science, 116, 100736(2021).

    [97] Tang W Z, Zhao T, Dou R et al. Fabrication of high-strength Si/SiC composites with low shrinkage rates via vat photopolymerization technology and liquid silicon infiltration[J]. Additive Manufacturing, 59, 103168(2022).

    [98] Bougoin M, Mallet F, Lavenac J et al. Full-SiC EUCLID’s very large telescope[J]. Proceedings of SPIE, 11180, 111801P(2019).

    [99] Lavenac J, Pamplona T, Gimenez J L et al. The SiC structure of the EUCLID NISP instrument[J]. Proceedings of SPIE, 10562, 105624J(2017).

    [100] Hu H F, Zhang C R, Li G D et al. A preparation method for carbon fiber reinforced silicon carbide composite material screws[P].

    [101] Sun G D, Tan Z Q, Zhang Q et al. Influence of Si and SiC coating on the microstructures and mechanical properties of C/C bolts[J]. Materials, 16, 1785(2023).

    [102] Pamplona T, Gimenez J L, Febvre A et al. Silicon carbide main structure for EUCLID NISP instrument in final development[J]. Proceedings of SPIE, 9912, 99120M(2016).

    [103] Kim Y H, Kim Y W. Direct bonding of silicon carbide ceramics sintered with yttria[J]. Journal of the European Ceramics Society, 39, 4487-4494(2019).

    [104] Bath D A, Williams S C, Bougoin M et al. Fabrication and optical characterization of a segmented and brazed mirror assembly[J]. Proceedings of SPIE, 6666, 66660L(2007).

    [105] Yoshitake T, Ohta Y, Kitayama M. Joining of SiC ceramics by the flash-bonding technique[J]. Journal of Materials Science and Chemical Engineering, 8, 52-65(2020).

    [106] Suyama S. Development of joining technology for SiC ceramics[J]. Journal of the Ceramic Society of Japan, 48, 610-614(2013).

    [107] Cockeram B V. Flexural strength and shear strength of silicon carbide to silicon carbide joints fabricated by a molybdenum diffusion bonding technique[J]. Journal of the American Ceramic Society, 88, 1892-1899(2005).

    [108] Liu H L, Tian C Y, Wu M Z. Technique of joining of Cf/SiC composite via preceramic silicone polysilazane and joining properties[J]. The Chinese Journal of Nonferrous Metals, 18, 278-281(2008).

    [109] Luo Z H, Jiang D L, Zhang J X et al. Development of SiC-SiC joint by reaction bonding method using SiC/C tapes as the interlayer[J]. Journal of the European Ceramic Society, 32, 3819-3824(2012).

    [110] Nelson J, Sanders G H. The status of the Thirty Meter Telescope Project[J]. Proceedings of SPIE, 7012, 70121A(2008).

    [111] Liu F C, Sanders G. Thirty Meter telescope projectstatus (conference presentation)[J]. Proceedings of SPIE, 10700, 1070013(2018).

    [112] Stepp L. Thirty Meter Telescope Project update[J]. Proceedings of SPIE, 8444, 84441G(2012).

    [113] Tamai R, Koehler B, Cirasuolo M et al. Status of the ESO’s ELT construction[J]. Proceedings of SPIE, 12182, 121821A(2022).

    [114] Wirth A, Cavaco J, Bruno T et al. Deformable mirror technologies at AOA Xinetics[J]. Proceedings of SPIE, 8780, 87800M(2013).

    [115] Villalba V, Kuiper H, Gill E. Review on thermal and mechanical challenges in the development of deployable space optics[J]. Journal of Astronomical Telescopes, Instruments, and Systems, 6, 010902(2020).

    [116] Döhring T. The market of huge monolithic mirror substrates for optical astronomy[J]. Proceedings of SPIE, 8837, 883702(2013).

    [117] Bowering N R, Fomenkov I V. EUV optics[P].

    [118] Ealey M A, Wellman J A. Cooled ISOFLOW laser mirrors[J]. Proceedings of SPIE, 1739, 374-382(1993).

    [119] Ahn K, Rhee H G, Yang H S et al. CVD SiC deformable mirror with monolithic cooling channels[J]. Optics Express, 26, 9724-9739(2018).

    [120] Pitschman M, Miller T, Hedges A R et al. Reaction bonded silicon carbide material characteristics as related to its use in high power laser systems[J]. Proceedings of SPIE, 9193, 919312(2014).

    Tools

    Get Citation

    Copy Citation Text

    Ge Zhang, Congcong Cui, Wei Li, Binchao Dong, Qi Cao, Lixun Zhou, Conghui Guo, Wei Zhang, Chuanxiang Xu, Wanli Zhu, Jianxun Bao. Research and Development of SiC Ceramic Fabrication Technologies for Optics and Fine Structures[J]. Acta Optica Sinica, 2024, 44(4): 0400003

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Reviews

    Received: Oct. 10, 2023

    Accepted: Jan. 29, 2024

    Published Online: Feb. 23, 2024

    The Author Email: Zhang Ge (zhanggeciomp@126.com), Bao Jianxun (baojianxun@ciomp.ac.cn)

    DOI:10.3788/AOS231638

    CSTR:32393.14.AOS231638

    Topics