Acta Optica Sinica, Volume. 44, Issue 4, 0400003(2024)
Research and Development of SiC Ceramic Fabrication Technologies for Optics and Fine Structures
Figures & Tables(25)
![SiC cold isostatic pressing and pressureless sintering for space opto-mechanical structural components[9]](/Images/icon/loading.gif){kind=icon}
Fig. 2. SiC cold isostatic pressing and pressureless sintering for space opto-mechanical structural components[9]
Fig. 5. Brazing joint of pressureless sintered SiC: SiC parts and brazed mirror blank[26]
Fig. 7. Reaction sintering NT SiC mirror blanks[34]. (a) NT SiC mirror with various diameters; (b) microstructure of NT SiC; (c) microstructure of joining area between NT SiC parts
Fig. 8. ECM's Cesic® and HB-Cesic®[37-39]. (a) Metallographic structure of Cesic®; (b) Cesic screwds; (c) Cesic® supporting structure for LSST sensor array; (d) HB-Cesic® mirror for DESIS multispectral imager of International Space Station; (e) all HB-Cesic® demo of SPICA telescope with Φ800 mm primary mirror and total mass of 25 kg
Fig. 9. SiC content and residual C in reaction sintered SiC[40]. (a) Volume fraction of SiC is 78%; (b) volume fraction of SiC is 93%
Fig. 10. Large-size monolithic SiC optics of Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences[6]. (a) SiC aspheric mirror with diameter of 4.03 m; (b) test results of SiC aspheric mirror with diameter of 4.03 m
Fig. 12. Voronoi-based design for topological optimization of mirror light-weight structures[65]
Fig. 13. BJP printed super light-weight SiC structures[75]. (a) Preforms via BJP; (b) sample of local structure; (c) densified SiC material via Si liquid reaction infiltration
Fig. 14. Φ250 mm sample of RoboSiCTM via Z-Process 3D printing combined with reaction bonding[78]
Fig. 16. SiC mirror material for additive manufacturing[94]. (a) Status of Φ100 mm SiC during DLP; (b) Φ100-620 mm SiC mirror blanks via DLP and LSI process
Fig. 17. Joining of Euclid telescope's SiC base plate with SiC supporting components through bolts[98]
Fig. 18. Various joint techniques applied in SiC opto-mechanical structure of Euclid NISP[103]
Fig. 21. Primary mirror, its segments and supporting structures of TMT telescope[112]
Fig. 22. Reaction joint of RB-SiC mirror with integrated water cooling channel[120]
Table 1. Comparison of various SiC materials for optics and fine structures
View tableTable 1. Comparison of various SiC materials for optics and fine structures
Organization and Institute Preparation methods Max sizes Specific stiffness Thermal stability Optical manufacturability Cost/time consumption Property BOOSTEC［
9 ，13 -17 ］（MERSON）
CIP，pressureless sintering 1.5 m（monolithic）；3.5 m（brazed） High High Moderate high，CVD SiC cladding is needed Moderate high/high Single phase SiC，residual micro pores included Shanghai Institute of Ceramics，CAS［ 20 -21 ］CIP，pressureless sintering 1.5 m（monolithic） High High Moderate high，CVD SiC cladding is needed Moderate high/high Single phase SiC，residual micro pores included Northrop Grumman Xinetics［ 2 ，28 -30 ］CERAFORM®，reaction sintering 1.5 m（monolithic） Moderate high High Moderate high，PVD Si cladding is needed Moderate/moderate low Low shrinkage L-3 Communications SSG［ 31 -32 ］Slip casting，reaction sintering 1.5 m（monolithic） Moderate High Moderate high，PVD Si cladding is needed Moderate/— —— NEC-Toshiba Space System Ltd.［ 27 ，34 -36 ］Die forming，reaction sintering 1 m（monolithic） High High High，the substrate is directly polishable for visible light imaging —/Moderate low Extremely high strength；difficult to enlarge the diameter ECM［ 37 -39 ］Die forming，reaction sintering 2.4 m（monolithic） Moderate high Moderate high Low，CVD SiC cladding is needed Moderate low/low Applicable for complex structure fabrication；heterogeneous and anisotropic Changchun Institute of Optics，Fine Mechanics and Physics，CAS［ 3 ，6 ，10 ，47 ，51 ，53 ］Gel-casting，reaction sintering 3.5 m（monolithic）；4.03 m（reaction bonded） High High Moderate high，CVD SiC or PVD Si cladding is needed Moderate/moderate low Applicable for complex structure fabrication，low shrinkage and residual stress China Building Materials Academy Co.，Ltd［ 44 -45 ］Slip casting，reaction sintering 1 m
（monolithic）
High High Moderate high，CVD SiC or PVD Si cladding is needed Moderate low/low — Trex Enterprises［ 56 -57 ，63 ］CVC 1.5 m（monolithic） High High High，the substrate is directly polishable for visible light imaging —/High High purity，high homogeneity，single phase SiC POCO［ 58 ，60 -64 ］CVC <1 m（monolithic） Moderate Moderate Low，CVD SiC cladding is needed Moderate low/low High residual porosity
Table 2. Comparison of SiC additive manufacturing methods for optics and fine structures[95-96]
View tableTable 2. Comparison of SiC additive manufacturing methods for optics and fine structures[95-96]
Additive manufacturing technologies Advantages Limitations and challenges Organizations and institutions Direct ink writing/DIW High utilization rate of the raw materials；
suitable for multi-material printing
Low forming accuracy and resolution；low efficiency of printing；
auxiliary support is needed for cantilever structure printing
Goodman Technologies，LLC；
Central South University
Fused deposition modeling/FDM Higher initial volume fraction of SiC in raw material up to 60%［
86 ］；high utilization rate of the raw materials；
suitable for multi-material printing
Control of the properties of the raw material is demanding；low forming accuracy and resolution；step effect on the surface；low efficiency of printing Goodman Technologies，LLC；Shanghai Institute of Ceramics，Chinese Academy of Sciences；
Changsha University of Technology
Binder jet printing/BJ/BJP/BJ3DP Better homogeneity；high efficiency of the raw material preparation；
wide applicability for various powder materials
Low printing resolution and surface quality；relative densities and the strength of the printed bodies are low Israel Institute of Metals；Goodman Technologies，LLC；
II-VI Technologies Co.，Ltd
Selective laser sintering/SLS Wide applicability for various powder materials；high efficiency of the raw material preparation；easy to achieve large size printed body up to 1.6 m［ 88 ］Low relative densities of the printed bodies due to the low packing efficiency；rigorous control of the thermal field during the printed process Huazhong University of Science and Technology；
Ningbo Flk Technology Co.，Ltd
Stereolithography/SL/SLA/DLP High efficiency of printing；high forming accuracy and surface quality；high volume fraction of ceramic loading up to 60%［ 97 ］High requirement of the properties of the slurry；SiC powder’s strong absorption and scattering of UV limit the cured thickness and the further increasement of the solid loading；large deformation of the printed bodies during the post processing HRL Laboratories；
Technology and Engineering Center for Space Utilization，Chinese Academy of Sciences；Beijing Institute of Technology；
Shanghai Institute of Ceramics，Chinese Academy of Sciences
Table 3. Advantages/disadvantages of the joint methods for the SiC optomechanical parts
View tableTable 3. Advantages/disadvantages of the joint methods for the SiC optomechanical parts
Methods Advantages Disadvantages Bolting［ 99 -101 ］Relatively high rigidity；high precision，up to μm level；
high technical maturity
Uncertainty of the tightening stress；
thermal property differences between the SiC parts and the bolt
Gluing［ 99 ］Low process requirement；high strength and reliability；wide applicability for various paring materials Relatively low precision，10 μm level or lower；thermal property differences between the bonding materials and the parent materials Ceramic bonding［ 17 ，103 ］High rigidity with long-term effectiveness；excellent thermoelastic properties Requirement of high temperature firing equipment with large size；requirement of precision supporting at high temperature；thermal property differences between the bonding materials and the parent materials Brazing［ 17 ，104 ］High rigidity with long-term effectiveness；high strength and reliability Residual stress due to the phase transformation of the bonding materials；thermal property differences between the bonding materials and the parent materials Reaction bonding High homogeneity and high rigidity；low residual stress；
long-term stability
Requirement of sintering equipment with large size
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Ge Zhang, Congcong Cui, Wei Li, Binchao Dong, Qi Cao, Lixun Zhou, Conghui Guo, Wei Zhang, Chuanxiang Xu, Wanli Zhu, Jianxun Bao. Research and Development of SiC Ceramic Fabrication Technologies for Optics and Fine Structures[J]. Acta Optica Sinica, 2024, 44(4): 0400003
Paper Information
Category: Reviews
Received: Oct. 10, 2023
Accepted: Jan. 29, 2024
Published Online: Feb. 23, 2024
The Author Email: Zhang Ge (zhanggeciomp@126.com), Bao Jianxun (baojianxun@ciomp.ac.cn)
CSTR:32393.14.AOS231638
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