[3] [3] Graf A, Arndt M, Gerlach G. Seebeck's effect in micromachined thermopiles for infrared detection. a review[J]. Estonian Journal of Engineering, 2007, 13(4): 338-353.

[5] [5] Mancarella F, Roncaglia A, Passim M, et al. Wafer-level testing of thermopile IR detectors[C]//The 4th IEEE Conference on Sensors, 2005, 2: 1133-1136.

[6] [6] Lei C, Mao H Y, Ou W, et al. A CMOS-MEMS IR device based on double-layer thermocouples[J]. Microsystem Technologies, 2016, 22(5): 1163-1171.

[7] [7] He Y Q, Wang Y L, Li T. Simultaneously controlling heat conduction and infrared absorption with a textured dielectric film to enhance the performance of thermopiles[J]. Microsystems & Nanoengineering, 2021, 7: 36.

[8] [8] Xu D H, Wang Y L, Xiong B, et al. MEMS-based thermoelectric infrared sensors: a review[J]. Frontiers of Mechanical Engineering, 2017, 12(4): 557-566.