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Laser & Infrared, Volume. 55, Issue 5, 724(2025)

Research on chip structure optimization of MEMS infrared thermopile sensor

QIAN Song-song1,2, LIN Zhen-heng1、*, XIE Hai-he1, HU Zhao-kun1,2, and NIE Yong-zhong3
Author Affiliations
  • 1Industrial College of New Engineer, Putian University, Putian 351100, China
  • 2College of Mechanical and Electrical Engineering, Fujian Agriculture and Forestry University, Fuzhou 350108, China
  • 3Xirenma United Measurement and Control (Quanzhou) Technology Co., Ltd., Quanzhou 362011, China
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    QIAN Song-song, LIN Zhen-heng, XIE Hai-he, HU Zhao-kun, NIE Yong-zhong. Research on chip structure optimization of MEMS infrared thermopile sensor[J]. Laser & Infrared, 2025, 55(5): 724

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    Paper Information

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    Received: Oct. 10, 2024

    Accepted: Jul. 11, 2025

    Published Online: Jul. 11, 2025

    The Author Email: LIN Zhen-heng (lintom2023@ptu.edu.cn)

    DOI:10.3969/j.issn.1001-5078.2025.05.012

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology