Dark-field detection method of shallow scratches on the super-smooth optical surface based on the technology of adaptive smoothing and morphological differencing

Chen Li; Yongying Yang; Huiting Chai; Yihui Zhang; Fan Wu; Lin Zhou; Kai Yan; Jian Bai; Yibing Shen; Qiao Xu; Hongzhen Jiang; Xu Liu

doi:10.3788/COL201715.081202

Chinese Optics Letters, Volume. 15, Issue 8, 081202(2017)

Dark-field detection method of shallow scratches on the super-smooth optical surface based on the technology of adaptive smoothing and morphological differencing

Chen Li¹, Yongying Yang^1、*, Huiting Chai¹, Yihui Zhang¹, Fan Wu¹, Lin Zhou¹, Kai Yan¹, Jian Bai¹, Yibing Shen¹, Qiao Xu², Hongzhen Jiang², and Xu Liu²

Author Affiliations

¹State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, China

²Research Center of Laser Fusion, CAEP, Mianyang 621900, China

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Cited By

[1] Pavel S. Ignatyev, Andrey A. Skrynnik, Yury A. Melnik, Sergey N. Grigoriev. Nanoscale surface characterization using laser interference microscopy. Mechanics & Industry, 18, 713(2017).

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Chen Li, Yongying Yang, Huiting Chai, Yihui Zhang, Fan Wu, Lin Zhou, Kai Yan, Jian Bai, Yibing Shen, Qiao Xu, Hongzhen Jiang, Xu Liu, "Dark-field detection method of shallow scratches on the super-smooth optical surface based on the technology of adaptive smoothing and morphological differencing," Chin. Opt. Lett. 15, 081202 (2017)

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Paper Information

Category: Instrumentation, measurement, and metrology

Received: Dec. 9, 2016

Accepted: May. 18, 2017

Published Online: Jul. 20, 2018

The Author Email: Yongying Yang (chuyyy@zju.edu.cn)

DOI:10.3788/COL201715.081202

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology