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Chinese Optics Letters, Volume. 15, Issue 8, 081202(2017)

Dark-field detection method of shallow scratches on the super-smooth optical surface based on the technology of adaptive smoothing and morphological differencing

Chen Li1, Yongying Yang1、*, Huiting Chai1, Yihui Zhang1, Fan Wu1, Lin Zhou1, Kai Yan1, Jian Bai1, Yibing Shen1, Qiao Xu2, Hongzhen Jiang2, and Xu Liu2
Author Affiliations
  • 1State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, China
  • 2Research Center of Laser Fusion, CAEP, Mianyang 621900, China
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    Chen Li, Yongying Yang, Huiting Chai, Yihui Zhang, Fan Wu, Lin Zhou, Kai Yan, Jian Bai, Yibing Shen, Qiao Xu, Hongzhen Jiang, Xu Liu, "Dark-field detection method of shallow scratches on the super-smooth optical surface based on the technology of adaptive smoothing and morphological differencing," Chin. Opt. Lett. 15, 081202 (2017)

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    Paper Information

    Category: Instrumentation, measurement, and metrology

    Received: Dec. 9, 2016

    Accepted: May. 18, 2017

    Published Online: Jul. 20, 2018

    The Author Email: Yongying Yang (chuyyy@zju.edu.cn)

    DOI:10.3788/COL201715.081202

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology