[1] HAN X G, HUANG M M, WU Z T et al. Advances in high-performance MEMS pressure sensors： design， fabrication， and packaging[J]. Microsystems & Nanoengineering, 9, 156(2023).

[2] SABHAPANDIT E, JINDAL S K, KANEKAL D et al. Numerical simulation of a striated piezoresistive MEMS pressure sensor on circular silicon diaphragm： a finite element method-based study[J]. Nano, 18, 2350023(2023).

[3] CHEN Y K, XU Q, ZHANG X Q et al. Materials and sensing mechanisms for high-temperature pressure sensors： a review[J]. IEEE Sensors Journal, 23, 26910-26924(2023).

[4] YANG Y, DAI Z H, CHEN Y et al. Emerging MEMS sensors for ocean physics： Principles， materials， and applications[J]. Applied Physics Reviews, 11(2024).

[5] THAWORNSATHIT P, JUNTASARO E, RATTANASONTI H et al. Enhancing performance of a MEMS-based piezoresistive pressure sensor by groove： investigation of groove design using finite element method[J]. Micromachines, 13, 2247(2022).

[6] CHUAI R Y, YANG Y X, ZHANG B et al. Overload performance study and fabrication of the capacitive pressure-sensitive chip with linkage film[J]. Review of Scientific Instruments, 93(2022).

[7] TIAN B, ZHAO Y L, JIANG Z D et al. The design and analysis of beam-membrane structure sensors for micro-pressure measurement[J]. Review of Scientific Instruments, 83(2012).

[8] LI C, CORDOVILLA F, JAGDHEESH R et al. Design and optimization of a novel structural MEMS piezoresistive pressure sensor[J]. Microsystem Technologies, 23, 4531-4541(2017).

[9] TRAN A V, ZHANG X M, ZHU B L. The development of a new piezoresistive pressure sensor for low pressures[J]. IEEE Transactions on Industrial Electronics, 65, 6487-6496(2018).

[10] YU Z L, ZHAO Y L, SUN L et al. Incorporation of beams into bossed diaphragm for a high sensitivity and overload micro pressure sensor[J]. Review of Scientific Instruments, 84(2013).

[11] MENG X W, ZHAO Y L. The design and optimization of a highly sensitive and overload-resistant piezoresistive pressure sensor[J]. Sensors, 16, 348(2016).

[12] YU Z L, ZHAO Y L, LI L L et al. Realization of a micro pressure sensor with high sensitivity and overload by introducing beams and Islands[J]. Microsystem Technologies, 21, 739-747(2015).

[13] KOBER T, WERTHSCHÜTZKY R. Overload-resistant pressure sensors in the nominal range of 10 mbar （1kPa）[J]. Procedia Engineering, 25, 611-614(2011).

[14] XU T Z, LU D J, ZHAO L B et al. Application and optimization of stiffness abruption structures for pressure sensors with high sensitivity and anti-overload ability[J]. Sensors, 17, 1965(2017).

[15] KANEKAL D, JINDAL S K. Optimizing piezoresistive MEMS pressure sensor on a double cross beam silicon diaphragm with statistical curve-fitting and optimization techniques[J]. IEEE Sensors Journal, 24, 169-176(2024).

[16] GAO C W, ZHANG D C. The establishment and verification of the sensitivity model of the piezoresistive pressure sensor based on the new peninsula structure[J]. Journal of Microelectromechanical Systems, 31, 305-314(2022).