Optics and Precision Engineering, Volume. 33, Issue 2, 209(2025)
Development of bi-directional high overload silicon-based differential pressure sensitive element
Figures & Tables(12)
Fig. 1. Beam-archipelago dislocated membrane structure differential pressure sensitive element and its main geometrical parameters
Fig. 2. Stress distribution of beam-archipelago dislocated membrane structure
Fig. 3. Dimensioning simulation results for misalignment distance
Fig. 5. Simulation results of silicon membrane geometrical dimensions
Fig. 6. Full scale potential distribution and differential pressure sensitive element output versus pressure
Fig. 7. Differential pressure sensitive element fabrication process flow
Fig. 8. Physical diagram of differential pressure sensitive element： （a） beam-archipelago dislocated membrane structure differential pressure sensitive element， （b） C-type membrane structure differential pressure sensitive element， （a1） Partial enlargement of archipelago structure， （a2） Partial enlargement of beam structure
Table 1. Size optimization results of beam-archipelago dislocated membrane structure
View tableView in ArticleTable 1. Size optimization results of beam-archipelago dislocated membrane structure
Dimensional variables Value/μm L 4 452 a 400 b 700 h 80 Δ 200
Table 2. Comparison of the overload capacity of different pressure sensitive elements
View tableView in ArticleTable 2. Comparison of the overload capacity of different pressure sensitive elements
Different pressure sensitive elements Scale Overload capability MPM288
（Mack sensors corporation）
100 kPa 2.5 times scale QBE2003-P1
（German Siemens company）
100 kPa 2.5 times scale 7000 series
（USA Merit Sensor company）
15 psi （103 kPa） 3 times scale Beam-archipelago dislocated membrane structure differential pressure sensitive element（The design of this paper） 100 kPa 8.5 times scale
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Liqun DU, Aoqi LI, Meng LI, Xiaocheng YANG, Xiangyue MENG, Huifeng QIU. Development of bi-directional high overload silicon-based differential pressure sensitive element[J]. Optics and Precision Engineering, 2025, 33(2): 209
Paper Information
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Received: Oct. 25, 2024
Accepted: --
Published Online: Apr. 30, 2025
The Author Email: Liqun DU (duliqun@dlut.edu.cn)
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