Acta Optica Sinica, Volume. 40, Issue 2, 0212003(2020)

Microspacing Measurement Based on Spectral Focusing Characteristics of Binary Optical Lens

Simo Wang1,2, Fanxing Li1,2, Fuping Peng1,2, Jialin Du1,2, and Wei Yan1,2、*
Author Affiliations
  • 1State Key Laboratory of Optical Technologies for Micro-fabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan 610209, China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
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    Figures & Tables(11)
    Axial and side views of binary optical lens
    Schematic of axial dispersion of binary optical lens
    Schematic of spectral confocal micro-spacing measurement of binary optical lens
    Diffraction images when image screen is at different locations from binary optical lens. (a) 20 mm; (b) 40 mm; (c) 50 mm; (d) 60 mm; (e) 80 mm
    Intensity distributions when image screen is at different locations from binary optical lens. (a) 20 mm; (b) 40 mm; (c) 50 mm; (d) 60 mm; (e) 80 mm
    Diffraction patterns under different incident light wavelengths when distances between light screen and binary optical lens are different. From top to bottom, distances between light screen and binary optical lens are 42.969, 46.610, 50.000, and 55.000 mm, respectively. From left to right, incident light wavelengths are 500, 550, 590, and 640 nm, respectively
    Original spectrum of spectrometer
    Spectra received by spectrometer at different locations
    Focal position of incident light with different wavelengths corresponds to axial coordinate of three-dimensional translation stage
    Measured optical disc
    Spectra of two adjacent thin films of optical disc
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    Simo Wang, Fanxing Li, Fuping Peng, Jialin Du, Wei Yan. Microspacing Measurement Based on Spectral Focusing Characteristics of Binary Optical Lens[J]. Acta Optica Sinica, 2020, 40(2): 0212003

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Jul. 24, 2019

    Accepted: Sep. 19, 2019

    Published Online: Jan. 2, 2020

    The Author Email: Yan Wei (yanwei@ioe.ac.cn)

    DOI:10.3788/AOS202040.0212003

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