Acta Optica Sinica, Volume. 40, Issue 2, 0212003(2020)
Microspacing Measurement Based on Spectral Focusing Characteristics of Binary Optical Lens
Fig. 3. Schematic of spectral confocal micro-spacing measurement of binary optical lens
Fig. 4. Diffraction images when image screen is at different locations from binary optical lens. (a) 20 mm; (b) 40 mm; (c) 50 mm; (d) 60 mm; (e) 80 mm
Fig. 5. Intensity distributions when image screen is at different locations from binary optical lens. (a) 20 mm; (b) 40 mm; (c) 50 mm; (d) 60 mm; (e) 80 mm
Fig. 6. Diffraction patterns under different incident light wavelengths when distances between light screen and binary optical lens are different. From top to bottom, distances between light screen and binary optical lens are 42.969, 46.610, 50.000, and 55.000 mm, respectively. From left to right, incident light wavelengths are 500, 550, 590, and 640 nm, respectively
Fig. 9. Focal position of incident light with different wavelengths corresponds to axial coordinate of three-dimensional translation stage
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Simo Wang, Fanxing Li, Fuping Peng, Jialin Du, Wei Yan. Microspacing Measurement Based on Spectral Focusing Characteristics of Binary Optical Lens[J]. Acta Optica Sinica, 2020, 40(2): 0212003
Category: Instrumentation, Measurement and Metrology
Received: Jul. 24, 2019
Accepted: Sep. 19, 2019
Published Online: Jan. 2, 2020
The Author Email: Yan Wei (yanwei@ioe.ac.cn)