Microspacing Measurement Based on Spectral Focusing Characteristics of Binary Optical Lens

Simo Wang; Fanxing Li; Fuping Peng; Jialin Du; Wei Yan

doi:10.3788/AOS202040.0212003

Acta Optica Sinica, Volume. 40, Issue 2, 0212003(2020)

Microspacing Measurement Based on Spectral Focusing Characteristics of Binary Optical Lens

Simo Wang^1,2, Fanxing Li^1,2, Fuping Peng^1,2, Jialin Du^1,2, and Wei Yan^1,2、*

¹State Key Laboratory of Optical Technologies for Micro-fabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan 610209, China

²University of Chinese Academy of Sciences, Beijing 100049, China

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Simo Wang, Fanxing Li, Fuping Peng, Jialin Du, Wei Yan. Microspacing Measurement Based on Spectral Focusing Characteristics of Binary Optical Lens[J]. Acta Optica Sinica, 2020, 40(2): 0212003

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Paper Information

Category: Instrumentation, Measurement and Metrology

Received: Jul. 24, 2019

Accepted: Sep. 19, 2019

Published Online: Jan. 2, 2020

The Author Email: Yan Wei (yanwei@ioe.ac.cn)

DOI:10.3788/AOS202040.0212003

Topics

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Instrumentation, Measurement and Metrology