Laser & Optoelectronics Progress, Volume. 62, Issue 17, 1730004(2025)
Thermal Growth Oxide Layer Thickness Detection Using Terahertz Time-Domain Spectroscopy Combined with Deep Learning
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Chenhao Xue, Jianhui Ma, Guang Yang, Jingqi Tong, Jiyuan Zhao. Thermal Growth Oxide Layer Thickness Detection Using Terahertz Time-Domain Spectroscopy Combined with Deep Learning[J]. Laser & Optoelectronics Progress, 2025, 62(17): 1730004
Category: Spectroscopy
Received: Jan. 15, 2025
Accepted: Feb. 26, 2025
Published Online: Sep. 12, 2025
The Author Email: Jiyuan Zhao (jiyuan.zhao@bistu.edu.cn)
CSTR:32186.14.LOP250520