[1] [1] HE X F, WEN Z Y, WEN Z Q, et al.. Influence of the pull-in on the force-balanced tunneling accelerometers[J].Journal of Sensor Technology,2008(4):596-599.(in Chinese)

[2] [2] LI W, LI M W, YANG F J. Tunneling accelerometer structure principle and minimum electrode distance analysis[J]. Journal of North Uniuersity of China(Natural Science Edition),2007:177-180.(in Chinese)

[4] [4] CHE L F,LU Y, XU Z H. Finite element simula-tion on packaging of hinged high-g micromachined accelerometer[J].Opt. Precision Eng.,2007,15(2):199-205.(in Chinese)

[5] [5] LI J L,FANG J CH, SHENG W,et al.. Calculation and simulation of silicon MEMS gyroscope with dual2mass resonant output[J]. Opt. Precision Eng.,2008,16(3):484-491.(in Chinese)

[6] [6] DONG J X. Micro Inertial Instruments- Micromechanical Accelerometer[M]. Beijing:Tsinghua University Press, 2003:38-52.(in Chinese)

[7] [7] M. K, LA O R, KINBERL Y L T. Robust feedback control design of an ultra-sensitive, high bandwidth tunneling accelerometer[C].American Control Conference,2005:4176-4180.

[8] [8] CUI T H, WANG J. Polymer-based wide-bandwidth and high-sensitivity micromachined electron tunneling accelerometers using hot embossing[J].Journal of MicroElectromechanical Systems,2005(9):895-902.

[9] [9] LIU J,QIN L,LIU J CH, et al.. A novel differential piezoelectric accelerating sensor[J].Opt.Precision Eng.,2007,15(6):903-909.(in Chinese)