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Optics and Precision Engineering, Volume. 17, Issue 6, 1361(2009)

Electromechanical coupling characteristics for force-balanced vacuum microelectronic accelerometer

YANG Yin-chuan1,2,3、*, LI Dong-ling1,2,3, and SHANG Zheng-guo1,2,3
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    YANG Yin-chuan, LI Dong-ling, SHANG Zheng-guo. Electromechanical coupling characteristics for force-balanced vacuum microelectronic accelerometer[J]. Optics and Precision Engineering, 2009, 17(6): 1361

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    Paper Information

    Received: Jan. 20, 2009

    Accepted: --

    Published Online: Aug. 28, 2009

    The Author Email: YANG Yin-chuan (phinex119@126.com)

    DOI:

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology