[1] Li F, Cheng J G, Wang M Y et al. An amplitude and phase hybrid modulation Fresnel diffractive optical element[J]. Optics Communications, 413, 44-47(2018). http://adsabs.harvard.edu/abs/2018OptCo.413...44L

[2] Gao L, To S, Yang H F et al. Effect of assembling errors on the diffraction efficiency for multilayer diffractive optical elements[J]. Applied Optics, 53, 7341-7347(2014). http://www.ncbi.nlm.nih.gov/pubmed/25402898

[3] Herrera-Fernandez J M, Sanchez-Brea L M. Double diffractive optical element system for near-field shaping[J]. Applied Optics, 50, 4587-4593(2011). http://www.opticsinfobase.org/ao/abstract.cfm?uri=ao-50-23-4587

[4] Fujikawa K, Hirakawa G, Shiono T et al. Optical properties of a Si binary optic microlens for infrared ray. [C]∥Proceedings IEEE the Tenth Annual International Workshop on Micro Electro Mechanical Systems, January 26-30, 1997, Nagoya, Japan. New York: IEEE, 360-365(1997).

[5] Beretta S, Cairoli M M, Viardi M. Optimum design of phase gratings for diffractive optical elements obtained by thin-film deposition[J]. Proceedings of SPIE, 1544, 2-9(1991). http://spie.org/Publications/Proceedings/Paper/10.1117/12.49368

[6] Xue C X, Cui Q F, Yang L L et al. Design and analysis of multi-layer diffractive optical elements with Cauchy dispersion formula[J]. Acta Optica Sinica, 31, 0623002(2011).

[7] Ma Z B, Kang F Z, Wang H. Effect of fabrication errors of double-layer BOE on diffractive efficiency[J]. Infrared and Laser Engineering, 45, 0918001(2016).

[8] Yoo S, Song H Y, Lee J et al. Cost-effective large-scale fabrication of diffractive optical elements by using conventional semiconducting processes[J]. Applied Optics, 51, 8052-8056(2012). http://www.ncbi.nlm.nih.gov/pubmed/23207317

[9] Xue C X, To S. Analysis of materials selected for multilayer diffractive optical elements[J]. Optik, 125, 3245-3248(2014). http://www.sciencedirect.com/science/article/pii/S0030402614001454

[10] Liu X, Zhang M, Pang H et al. Fabrication of large-angle diffractive optical element based on nanoimprint lithography[J]. Acta Photonica Sinica, 45, 0605001(2016).

[11] Liu Y F, Lü C L, Li M J et al. High refractive index organic-inorganic hybrid coatings with TiO2 nanocrystals[J]. Colloids and Surfaces A: Physicochemical and Engineering Aspects, 328, 67-72(2008). http://www.sciencedirect.com/science/article/pii/S0927775708004202

[12] Mataki H, Yamaki S, Fukui T. Nanostructured organic/inorganic composites as transparent materials for optical components[J]. Japanese Journal of Applied Physics, 43, 5819-5823(2004).

[13] Yang L L, Cui Q F, Liu T et al. Effects of manufacturing errors on diffraction efficiency for multilayer diffractive optical elements[J]. Applied Optics, 50, 6128-6133(2011). http://www.ncbi.nlm.nih.gov/pubmed/22083385

[14] Iwasa H. -08-12[2018-12-01]. https:∥patents.google.com/patent/US8804245B2/en.(2014).

[15] production method therefor: US9557454[P]. -01-31[2018-12-02]. https:∥patents.google.com/patent/US20130301132.(2017).