Manufacturing Technology of Diffractive Optical Elements Formed by Ultraviolet-Cured Organic-Inorganic Nanocomposites

Lun Wang; Changxi Xue; Xirui Lan; Chuang Li; Bairong Wu; Meng Jia; Lei Wang

doi:10.3788/AOS201939.0722001

Acta Optica Sinica, Volume. 39, Issue 7, 0722001(2019)

Manufacturing Technology of Diffractive Optical Elements Formed by Ultraviolet-Cured Organic-Inorganic Nanocomposites

Lun Wang, Changxi Xue^*, Xirui Lan, Chuang Li, Bairong Wu, Meng Jia, and Lei Wang

Author Affiliations

School of Optoelectronic Engineering, Changchun University of Science and Technology, Changchun, Jilin 130022, China

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Figures & Tables(9)

$Refractive index of composites as a function of content of ITO$

Fig. 1. Refractive index of composites as a function of content of ITO

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Fig. 2. Flow chart of UV curing experiment. 1: substrate that transmits UV light; 2: UV-cured organic-inorganic nanocomposites; 3: metal mold-core; 4: shim that can adjust thickness of UV-cured layer

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$ITO nanoparticles with same mold core and different mass fractions. (a) 2.1%; (b) 10.5%; (b) 33.5%$

Fig. 3. ITO nanoparticles with same mold core and different mass fractions. (a) 2.1%; (b) 10.5%; (b) 33.5%

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$Diffractive optical elements with 16 mm diameter. (a) Mold core; (b) pre-molding; (c) post-molding$

Fig. 4. Diffractive optical elements with 16 mm diameter. (a) Mold core; (b) pre-molding; (c) post-molding

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Fig. 5. Roughness Ra of mold core and UV-cured elements measured by white-light interferometer

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$Microstructure heights of mold core of diffraction optical elements and UV-cured elements multi-measured by step instrument$

Fig. 6. Microstructure heights of mold core of diffraction optical elements and UV-cured elements multi-measured by step instrument

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Table 1. Organic components of UV-cured materials for debugging experiments
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Table 1. Organic components of UV-cured materials for debugging experiments
Number 1 2 3 4 5 6 7 8 9 10
2PUA /g 10 9 8 7 6 5 4 3 2 1
PETA /g 0 1 2 3 4 5 6 7 8 9
Irgacure 184 /g 0.24 0.23 0.26 0.23 0.25 0.27 0.24 0.25 0.25 0.26

Table 2. Experimental table of organic-inorganic nanocomposites
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Table 2. Experimental table of organic-inorganic nanocomposites
2PUA /g PETA /g Irgacure 184 /g Irgacure 1173 /g Irgacure 819 /g ITO /g Content of ITO /%
6 4 0.14 0 0 0.22 2.1
6 4 0 0.15 0 1.06 10.5
6 4 0 0 0.15 5.04 33.5

Table 3. Microstructure heights of mold core of diffraction optical elements and UV-cured elements multi-measured by step instrument
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Table 3. Microstructure heights of mold core of diffraction optical elements and UV-cured elements multi-measured by step instrument
Number 1 2 3 4 5 Average value Relative error Percent /%
Height of mold /μm 13.05 13.29 13.38 13.42 13.17 13.26 - -
Height of element /μm 13.00 12.56 12.54 12.41 12.40 12.58 -0.68 5.141

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Lun Wang, Changxi Xue, Xirui Lan, Chuang Li, Bairong Wu, Meng Jia, Lei Wang. Manufacturing Technology of Diffractive Optical Elements Formed by Ultraviolet-Cured Organic-Inorganic Nanocomposites[J]. Acta Optica Sinica, 2019, 39(7): 0722001

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