Study on the Laser Marking Process of Silicon Wafer

APPLIED LASER, Volume. 43, Issue 4, 80(2023)

Li Guoqi^1,2、*, Zhang Lingling^1,2, and Chen Yu³

Author Affiliations

¹[in Chinese]

²[in Chinese]

³[in Chinese]

show less

Figures & Tables(0)

Tools

Get Citation

Copy Citation Text

Li Guoqi, Zhang Lingling, Chen Yu. Study on the Laser Marking Process of Silicon Wafer[J]. APPLIED LASER, 2023, 43(4): 80

Download Citation

Paper Information

Category:

Received: Apr. 21, 2022

Accepted: --

Published Online: Nov. 17, 2023

The Author Email: Guoqi Li (1057546243@qq.com)

Topics