Journal of Synthetic Crystals, Volume. 54, Issue 2, 197(2025)

Growth of 2-Inch Fe-Doped β-Ga2O3 Single Crystal with High Resistance and Properties of (010) Substrates

YAN Yuchao1,2, WANG Cheng3, LU Changcheng3, LIU Yingying3, XIA Ning3, JIN Zhu2, ZHANG Hui1,2、*, and YANG Deren1,2
Author Affiliations
  • 1State Key Laboratory of Silicon and Advanced Semiconductor Materials, School of Materials Science and Engineering, Zhejiang University, Hangzhou 310027, China
  • 2Institute of Advanced Semiconductors & Zhejiang Provincial Key Laboratory of Power Semiconductor Materials and Devices, ZJU-Hangzhou Global Scientific and Technological Innovation Center, Hangzhou 311200, China
  • 3Hangzhou Garen Semiconductor Company Limited, Hangzhou 311200, China
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    [4] [4] LI Q, GUAN X, ZHONG Y, et al. Structures, influences, and formation mechanism of planar defects on (100), (001) and (-201) planes in -Ga2O3 crystals[J]. Physical Chemistry Chemical Physics, 2024, 26(16): 12564-12572.

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    [7] [7] GALAZKA Z, GANSCHOW S, SEYIDOV P, et al. Two inch diameter, highly conducting bulk -Ga2O3 single crystals grown by the Czochralski method[J]. Applied Physics Letters, 2022, 120(15): 152101.

    [8] [8] KURAMATA A, KOSHI K, WATANABE S, et al. High-quality -Ga2O3 single crystals grown by edge-defined film-fed growth[J]. Japanese Journal of Applied Physics, 2016, 55(12): 1202A2.

    [9] [9] UEDA Y, IGARASHI T, KOSHI K, et al. Two-inch Fe-doped -Ga2O3 (010) substrates prepared using vertical Bridgman method[J]. Japanese Journal of Applied Physics, 2023, 62: SF1006.

    [10] [10] GAO X, MA K K, JIN Z, et al. Characteristics of 4-inch (100) oriented Mg-doped -Ga2O3 bulk single crystals grown by a casting method[J]. Journal of Alloys and Compounds, 2024, 987: 174162.

    [11] [11] GUO Z, VERMA A, WU X F, et al. Anisotropic thermal conductivity in single crystal -gallium oxide[J]. Applied Physics Letters, 2015, 106(11): 111909.

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    [13] [13] BU Y Z, WEI J S, SAI Q L, et al. The origin of twins in the growth of the (100) plane of a -Ga2O3 crystal using EFG[J]. CrystEngComm, 2023, 25(24): 3556-3563.

    [14] [14] GALAZKA Z, FIEDLER A, POPP A, et al. Bulk single crystals and physical properties of -(AlxGa1-x)2O3 (x=0-0.35) grown by the Czochralski method[J]. Journal of Applied Physics, 2023, 133(3): 035702.

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    YAN Yuchao, WANG Cheng, LU Changcheng, LIU Yingying, XIA Ning, JIN Zhu, ZHANG Hui, YANG Deren. Growth of 2-Inch Fe-Doped β-Ga2O3 Single Crystal with High Resistance and Properties of (010) Substrates[J]. Journal of Synthetic Crystals, 2025, 54(2): 197

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    Paper Information

    Category:

    Received: Aug. 29, 2024

    Accepted: Mar. 31, 2025

    Published Online: Mar. 31, 2025

    The Author Email: ZHANG Hui (msezhanghui@zju.edu.cn)

    DOI:10.16553/j.cnki.issn1000-985x.20241120.001

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