Optics and Precision Engineering, Volume. 20, Issue 1, 58(2012)
Fabrication of large grain size p-Si film by phase modulated excimer laser crystallization
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ZHANG Jian, LIN Guang-ping, ZHANG Rui, CUI Guo-yu, LI Chuan-nan. Fabrication of large grain size p-Si film by phase modulated excimer laser crystallization[J]. Optics and Precision Engineering, 2012, 20(1): 58
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Received: Jun. 17, 2011
Accepted: --
Published Online: Feb. 14, 2012
The Author Email: ZHANG Jian (zhangjian@jlu.edu.cn)
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