Fig. 1. Diagram of emission bandwidth and photon energy of excimer laser^[4]

Fig. 2. Layout of high power excimer laser target experiment platform^[19]

Fig. 3. A series of excimer laser products of Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences. (a) FBG 200 excimer laser; (b) PLD 20 excimer laser

Fig. 4. Typical excimer potential energy curves^[20,34]

Fig. 5. Structure diagram of excimer laser excited by discharge ^[4]

Fig. 6. CC energy transfer circuit based on thyratron

Fig. 7. Diagram of all solid state excitation circuit

Fig. 8. Gas discharge chamber indication^[34]

Fig. 9. Different electric field cloud images of the same electrode structure^[51]. (a) Compact Chang’s surface electrode; (b) compact Chang’s surface electrode with preionization plate

Fig. 10. Commonly used preionization structure indication. (a) Corona preionization^［55］; (b) bare spark pre-ionization^［56］; (c) surface creepage preionization^［57］

Fig. 11. Flow field simulation in discharge chamber^[60]. (a) Cloud map of velocity of gas inside chamber; (b) vector graph of gas flow velocity between electrodes

Fig. 12. Typical excimer laser beam distribution

Fig. 13. Positively supported unstable cavity in standard mode^[4]

Fig. 14. TWINSCAN NXT: 2050i, ASML, Netherlands^[75]

Fig. 15. Diagram of MOPA excimer laser system^[76]

Fig. 16. Coherent's two-cavity synchronous combination technology scheme^[93]

Fig. 17. Application of multi-cavity plate annealing^[92]

Fig. 18. A long pulse pump circuit^[114]

Fig. 19. Principle of PLD^[5]

Fig. 20. LA-ICP-MS system structure diagram