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Laser & Optoelectronics Progress, Volume. 60, Issue 19, 1900006(2023)

Discharge-Pumped Excimer Laser Technologies and Applications

Xu Liang1、*, Qihui Shen1,2, Jingzhen Shao1, and Ying Lin1
Author Affiliations
  • 1Anhui Institute of Optics and Fine Mechanics, Hefei Institute of Physical Science, Chinese Academy of Sciences, Hefei 230031, Anhui , China
  • 2University of Science and Technology of China, Hefei 230026, Anhui ,China
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    Article index updated: Sep. 4, 2025

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    Xu Liang, Qihui Shen, Jingzhen Shao, Ying Lin. Discharge-Pumped Excimer Laser Technologies and Applications[J]. Laser & Optoelectronics Progress, 2023, 60(19): 1900006

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    Paper Information

    Category: Reviews

    Received: May. 6, 2022

    Accepted: Jun. 20, 2022

    Published Online: Sep. 20, 2023

    The Author Email: Xu Liang (liangxu@aiofm.ac.cn)

    DOI:10.3788/LOP221521

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology