Chinese Optics, Volume. 17, Issue 3, 640(2024)
Error modeling of polarization devices in simultaneous phase-shifted lateral shearing interferometry
Fig. 1. Schematic diagram of simultaneous phase shift lateral shearing interferometry
Fig. 2. Residual surface shape varying with waveplate phase delay error
Fig. 3. Residual surface shape varying with waveplate fast axis azimuth error
Fig. 4. Residual surface shape varying with polarizer array azimuth error
Fig. 5. Synchronous phase-shift transverse shear interferometry system
Table 1. Comparative analysis of residual (Unit: λ)
View tableView in ArticleTable 1. Comparative analysis of residual (Unit: λ)
PV RMS 实验结果残差 0.0058 0.0026 仿真结果残差 0.0040 0.0015
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Yu-wen ZHANG, Bing-cai LIU, Hong-jun WANG, Ai-ling TIAN, Ke-xin REN, Kai WANG. Error modeling of polarization devices in simultaneous phase-shifted lateral shearing interferometry[J]. Chinese Optics, 2024, 17(3): 640
Category: Original Article
Received: Aug. 30, 2023
Accepted: Nov. 23, 2023
Published Online: Jul. 31, 2024
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