Journals Articles Conferences News About CLP
Submit a paper Email Alert
Search
Search
Articles
Journals
News
Advanced Search
Top Searches
2D MaterialsTransformation opticsQuantum PhotonicsSmall lasersSemiconductor UV PhotonicsSupersymmetric microring laser arrays

Chinese Optics Letters, Volume. 19, Issue 7, 072201(2021)

Self-aligned fiber-based dual-beam source for STED nanolithography

Jian Chen, Guoliang Chen, and Qiwen Zhan*
Author Affiliations
  • School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 201800, China
    • show less
    Full TextGet PDF
    Figures&Tables (6)
    Equations (2)
    References (32)
    Cited By (2)
    Tools
    Paper Information
    Topics
    References(32)

    [1] S. W. Hell, J. Wichmann. Breaking the diffraction resolution limit by stimulated emission: stimulated-emission-depletion fluorescence microscopy. Opt. Lett., 19, 780(1994).

    [2] J. Du, S. Deng, S. Hou, L. Qiao, J. Chen, Q. Huang, C. Fan, Y. Cheng, Y. Zhao. Superresolution imaging of DNA tetrahedral nanostructures in cells by STED method with continuous wave lasers. Chin. Opt. Lett., 12, 041101(2014).

    [3] T. A. Klar, R. Wollhofen, J. Jacak. Sub-Abbe resolution: from STED microscopy to STED lithography. Phys. Scripta, 2014, 014049(2014).

    [4] Y. L. Zhang, Q. D. Chen, H. Xia, H. B. Sun. Designable 3D nanofabrication by femtosecond laser direct writing. Nano. Today, 5, 435(2010).

    [5] M. Wiesbauer, R. Wollhofen, B. Vasic, K. Schilcher, J. Jacak, T. A. Klar. Nano-anchors with single protein capacity produced with STED lithography. Nano. Lett., 13, 5672(2013).

    [6] J. Fischer, M. Wegener. Three-dimensional optical laser lithography beyond the diffraction limit. Laser Photon. Rev., 7, 22(2013).

    [7] X. He, T. Li, J. Zhang, Z. Wang. STED direct laser writing of 45 nm width nanowire. Micromachines, 10, 726(2019).

    [8] T. Jiang, S. Gao, Z. Tian, H. Zhang, L. Niu. Fabrication of diamond ultra-fine structures by femtosecond laser. Chin. Opt. Lett., 18, 101402(2020).

    [9] B. Buchegger, J. Kreutzer, B. Plochberger, R. Wollhofen, D. Sivun, J. Jacak, G. J. Schütz, U. Schubert, T. A. Klar. Stimulated emission depletion lithography with mercapto-functional polymers. ACS Nano, 10, 1954(2016).

    [10] J. Kaschke, M. Wegener. Gold triple-helix mid-infrared metamaterial by STED-inspired laser lithography. Opt. Lett., 40, 3986(2015).

    [11] M. Deubel, G. von Freymann, M. Wegener, S. Pereira, K. Busch, C. M. Soukoulis. Direct laser writing of three-dimensional photonic-crystal templates for telecommunications. Nat. Mater., 3, 444(2004).

    [12] J. Fischer, G. von Freymann, M. Wegener. The materials challenge in diffraction-unlimited direct-laser-writing optical lithography. Adv. Mater., 22, 3578(2010).

    [13] L. Li, R. R. Gattass, E. Gershgoren, H. Hwang, J. T. Fourkas. Achieving λ/20 resolution by one-color initiation and deactivation of polymerization. Science, 324, 910(2009).

    [14] Z. B. Sun, X. Z. Dong, W. Q. Chen, S. Nakanishi, X. M. Duan, S. Kawata. Multicolor polymer nanocomposites: in situ synthesis and fabrication of 3D microstructures. Adv. Mater., 20, 914(2008).

    [15] T. F. Scott, B. A. Kowalski, A. C. Sullivan, C. N. Bowman, R. R. McLeod. Two-color single-photon photoinitiation and photoinhibition for subdiffraction photolithography. Science, 324, 913(2009).

    [16] H. Xia, S. Yang, L. Wang, J. Zhao, C. Xue, Y. Wu, R. Tai. Nonuniform self-imaging of achromatic Talbot lithography. Chin. Opt. Lett., 17, 062201(2019).

    [17] J. Fischer, J. B. Mueller, A. S. Quick, J. Kaschke, C. Barner-Kowollik, M. Wegener. Exploring the mechanisms in STED-enhanced direct laser writing. Adv. Opt. Mater., 3, 221(2015).

    [18] Z. Gan, Y. Cao, R. A. Evans, M. Gu. Three-dimensional deep sub-diffraction optical beam lithography with 9 nm feature size. Nat. Commun., 4, 2061(2013).

    [19] M. Gu, H. Kang, X. Li. Breaking the diffraction-limited resolution barrier in fiber-optical two-photon fluorescence endoscopy by an azimuthally-polarized beam. Sci. Rep. UK, 4, 3627(2014).

    [20] D. Wildanger, J. Bückers, V. Westphal, S. W. Hell, L. Kastrup. A STED microscope aligned by design. Opt, Express, 17, 16100(2009).

    [21] L. Yan, P. Kristensen, S. Ramachandran. Vortex fibers for STED microscopy. APL Photon., 4, 022903(2019).

    [22] S. Ramachandran, P. Kristensen. Optical vortices in fiber. Nanophotonics, 2, 455(2013).

    [23] S. Ramachandran, P. Kristensen, M. F. Yan. Generation and propagation of radially polarized beams in optical fibers. Opt. Lett., 34, 2525(2009).

    [24] A. Chong, L. G. Wright, F. W. Wise. Ultrafast fiber lasers based on self-similar pulse evolution: a review of current progress. Rep. Prog. Phys., 78, 113901(2015).

    [25] C. Y. Chong, J. Buckley, F. Wise. All-normal-dispersion femtosecond fiber laser. Opt. Express, 14, 10095(2006).

    [26] Y. Xue, C. Kuang, X. Hao, Z. Gu, X. Liu. A method for generating a three-dimensional dark spot using a radially polarized beam. J. Opt., 13, 125704(2011).

    [27] J. Chen, C. Wan, L. Kong, Q. Zhan. Experimental generation of complex optical fields for diffraction limited optical focus with purely transverse spin angular momentum. Opt. Express, 25, 8966(2017).

    [28] Q. Zhan, J. R. Leger. Focus shaping using cylindrical vector beams. Opt. Express, 10, 324(2002).

    [29] Q. Zhan. Cylindrical vector beams: from mathematical concepts to applications. Adv. Opt. Photon., 1, 1(2009).

    [30] J. Chen, C. Wan, L. J. Kong, Q. W. Zhan. Tightly focused optical field with controllable photonic spin orientation. Opt. Express, 25, 19517(2017).

    [31] P. Török, P. R. T. Munro. The use of Gauss–Laguerre vector beams in STED microscopy. Opt. Express, 12, 3605(2004).

    [32] M. Dyba, S. W. Hell. Focal spots of size λ/23 open up far-field florescence microscopy at 33 nm axial resolution. Phys. Rev. Lett., 88, 163901(2002).

    CLP Journals

    [1] Xingwang Chen, Lei Chen, Ying Wang, Tao Wei, Jing Hu, Miao Cheng, Qianqian Liu, Wanfei Li, Yun Ling, Bo Liu, "AgGeSbTe thin film as a negative heat-mode resist for dry lithography," Chin. Opt. Lett. 20, 031601 (2022)

    Cited By

    [1] Guoliang Chen, Dewei Mo, Jian Chen, Qiwen Zhan.

    [1] Guoliang Chen, Dewei Mo, Jian Chen, Qiwen Zhan.

    [1] Guoliang Chen, Dewei Mo, Jian Chen, Qiwen Zhan.

    [1] Guoliang Chen, Dewei Mo, Jian Chen, Qiwen Zhan.

    [1] Guoliang Chen, Dewei Mo, Jian Chen, Qiwen Zhan.

    [1] Guoliang Chen, Dewei Mo, Jian Chen, Qiwen Zhan.

    [1] Guoliang Chen, Dewei Mo, Jian Chen, Qiwen Zhan.

    [1] Guoliang Chen, Dewei Mo, Jian Chen, Qiwen Zhan.

    [1] Guoliang Chen, Dewei Mo, Jian Chen, Qiwen Zhan.

    [1] Guoliang Chen, Dewei Mo, Jian Chen, Qiwen Zhan.

    [1] Guoliang Chen, Dewei Mo, Jian Chen, Qiwen Zhan.

    [1] Guoliang Chen, Dewei Mo, Jian Chen, Qiwen Zhan.

    [1] Guoliang Chen, Dewei Mo, Jian Chen, Qiwen Zhan.

    [1] Guoliang Chen, Dewei Mo, Jian Chen, Qiwen Zhan.

    [1] Guoliang Chen, Dewei Mo, Jian Chen, Qiwen Zhan.

    [1] Guoliang Chen, Dewei Mo, Jian Chen, Qiwen Zhan.

    [1] Guoliang Chen, Dewei Mo, Jian Chen, Qiwen Zhan.

    [1] Guoliang Chen, Dewei Mo, Jian Chen, Qiwen Zhan.

    [1] Guoliang Chen, Dewei Mo, Jian Chen, Qiwen Zhan.

    [1] Guoliang Chen, Dewei Mo, Jian Chen, Qiwen Zhan.

    [1] Guoliang Chen, Dewei Mo, Jian Chen, Qiwen Zhan.

    Tools

    Get Citation

    Copy Citation Text

    Jian Chen, Guoliang Chen, Qiwen Zhan, "Self-aligned fiber-based dual-beam source for STED nanolithography," Chin. Opt. Lett. 19, 072201 (2021)

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Set citation alerts for article
    Save article for my favorites
    Paper Information

    Category: Optical Design and Fabrication

    Received: Sep. 3, 2020

    Accepted: Dec. 5, 2020

    Posted: Dec. 7, 2020

    Published Online: Mar. 22, 2021

    The Author Email: Qiwen Zhan (qwzhan@usst.edu.cn)

    DOI:10.3788/COL202119.072201

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology