Chinese Journal of Lasers, Volume. 41, Issue 3, 302003(2014)

Research and Analysis of Focal Spot Overlapping for Excimer Laser

Xue Quanxi1,2、*, Jiang Shao′en1, Zhao Xueqing2, Wang Zhebin1, Hu Yun2, Ye Xisheng2, and Liu Jingru2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    References(19)

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    Xue Quanxi, Jiang Shao′en, Zhao Xueqing, Wang Zhebin, Hu Yun, Ye Xisheng, Liu Jingru. Research and Analysis of Focal Spot Overlapping for Excimer Laser[J]. Chinese Journal of Lasers, 2014, 41(3): 302003

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    Paper Information

    Category: Laser physics

    Received: Jun. 19, 2013

    Accepted: --

    Published Online: Feb. 28, 2014

    The Author Email: Quanxi Xue (quanxixue@163.com)

    DOI:10.3788/cjl201441.0302003

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