Chinese Journal of Lasers, Volume. 41, Issue 3, 302003(2014)
Research and Analysis of Focal Spot Overlapping for Excimer Laser
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Xue Quanxi, Jiang Shao′en, Zhao Xueqing, Wang Zhebin, Hu Yun, Ye Xisheng, Liu Jingru. Research and Analysis of Focal Spot Overlapping for Excimer Laser[J]. Chinese Journal of Lasers, 2014, 41(3): 302003
Paper Information
Category: Laser physics
Received: Jun. 19, 2013
Accepted: --
Published Online: Feb. 28, 2014
The Author Email: Quanxi Xue (quanxixue@163.com)
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