Chinese Journal of Lasers, Volume. 31, Issue 12, 1469(2004)

Effect of Absorption Character to the Reflectance of 193 nm HfO2/SiO2, Y2O3/SiO2 and Al2O3/SiO2 Multilayer Thin Films

[in Chinese]*, [in Chinese], [in Chinese], [in Chinese], and [in Chinese]
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Effect of Absorption Character to the Reflectance of 193 nm HfO2/SiO2, Y2O3/SiO2 and Al2O3/SiO2 Multilayer Thin Films[J]. Chinese Journal of Lasers, 2004, 31(12): 1469

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    Paper Information

    Category: materials and thin films

    Received: Jun. 19, 2003

    Accepted: --

    Published Online: Jun. 12, 2006

    The Author Email: (seajing@opfilm.com)

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