Spectroscopy and Spectral Analysis, Volume. 29, Issue 11, 3134(2009)
Analysis of Optical Emission Spectra from ICP of Ar in the Vicinity of Plasma Sheath
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ZHAO Wen-feng, CHEN Jun-fang, MENG Ran. Analysis of Optical Emission Spectra from ICP of Ar in the Vicinity of Plasma Sheath[J]. Spectroscopy and Spectral Analysis, 2009, 29(11): 3134
Paper Information
Received: Nov. 8, 2008
Accepted: --
Published Online: May. 26, 2010
The Author Email: Wen-feng ZHAO (zwf555@scau.edu.cn)
CSTR:32186.14.
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